6/2/2010	9:11:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	9:11:36 AM	Recipe started at 9:11 AM
6/2/2010	9:11:36 AM	H2 valve closed
6/2/2010	9:11:36 AM	BCl3 valve closed
6/2/2010	9:11:36 AM	PH3 valve closed
6/2/2010	9:11:36 AM	SiCl4 pre valve closed
6/2/2010	9:11:36 AM	SiCl4 post valve closed
6/2/2010	9:11:36 AM	Main Vac valve closed
6/2/2010	9:11:36 AM	Bypass valve closed
6/2/2010	9:11:36 AM	Bubbler valve closed
6/2/2010	9:11:36 AM	Helium valve opened
6/2/2010	9:11:36 AM	Helium MFC set to  500.000000
6/2/2010	9:11:36 AM	H2 MFC set to  0.000000
6/2/2010	9:11:36 AM	BCl3 MFC set to  0.000000
6/2/2010	9:11:36 AM	PHl3 MFC set to  0.000000
6/2/2010	9:11:36 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:11:36 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:11:36 AM	Tube furnace set to 0
6/2/2010	9:12:57 AM	Helium valve closed
6/2/2010	9:12:57 AM	H2 valve closed
6/2/2010	9:12:57 AM	BCl3 valve closed
6/2/2010	9:12:57 AM	PH3 valve closed
6/2/2010	9:12:57 AM	SiCl4 pre valve closed
6/2/2010	9:12:57 AM	SiCl4 post valve closed
6/2/2010	9:12:57 AM	Main Vac valve closed
6/2/2010	9:12:57 AM	Bypass valve closed
6/2/2010	9:12:57 AM	Bubbler valve closed
6/2/2010	9:12:57 AM	Helium MFC set to  0.000000
6/2/2010	9:12:57 AM	H2 MFC set to  0.000000
6/2/2010	9:12:57 AM	BCl3 MFC set to  0.000000
6/2/2010	9:12:57 AM	PHl3 MFC set to  0.000000
6/2/2010	9:12:57 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:12:57 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:12:57 AM	Tube furnace set to 0
6/2/2010	9:12:57 AM	Run finished at 9:12 AM
6/2/2010	9:12:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	9:23:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	9:23:28 AM	Recipe started at 9:23 AM
6/2/2010	9:23:28 AM	Helium valve closed
6/2/2010	9:23:28 AM	H2 valve closed
6/2/2010	9:23:28 AM	BCl3 valve closed
6/2/2010	9:23:28 AM	PH3 valve closed
6/2/2010	9:23:28 AM	SiCl4 pre valve closed
6/2/2010	9:23:28 AM	SiCl4 post valve closed
6/2/2010	9:23:28 AM	Main Vac valve closed
6/2/2010	9:23:28 AM	Bubbler valve closed
6/2/2010	9:23:28 AM	Bypass valve opened
6/2/2010	9:23:28 AM	Helium MFC set to  0.000000
6/2/2010	9:23:28 AM	H2 MFC set to  0.000000
6/2/2010	9:23:28 AM	BCl3 MFC set to  0.000000
6/2/2010	9:23:28 AM	PHl3 MFC set to  0.000000
6/2/2010	9:23:28 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:23:28 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:23:28 AM	Tube furnace set to 0
6/2/2010	9:24:18 AM	Run aborted at 9:24 AM
6/2/2010	9:24:18 AM	Helium valve closed
6/2/2010	9:24:18 AM	H2 valve closed
6/2/2010	9:24:18 AM	BCl3 valve closed
6/2/2010	9:24:18 AM	PH3 valve closed
6/2/2010	9:24:18 AM	SiCl4 pre valve closed
6/2/2010	9:24:18 AM	SiCl4 post valve closed
6/2/2010	9:24:18 AM	Bypass valve closed
6/2/2010	9:24:18 AM	Main Vac valve closed
6/2/2010	9:24:18 AM	Bubbler valve closed
6/2/2010	9:24:18 AM	Helium MFC set to  0.000000
6/2/2010	9:24:18 AM	H2 MFC set to  0.000000
6/2/2010	9:24:18 AM	BCl3 MFC set to  0.000000
6/2/2010	9:24:18 AM	PHl3 MFC set to  0.000000
6/2/2010	9:24:18 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:24:19 AM	Tube furnace set to 0
6/2/2010	9:24:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	9:24:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	9:24:24 AM	Recipe started at 9:24 AM
6/2/2010	9:24:24 AM	H2 valve closed
6/2/2010	9:24:24 AM	BCl3 valve closed
6/2/2010	9:24:24 AM	PH3 valve closed
6/2/2010	9:24:24 AM	SiCl4 pre valve closed
6/2/2010	9:24:24 AM	SiCl4 post valve closed
6/2/2010	9:24:24 AM	Main Vac valve closed
6/2/2010	9:24:24 AM	Bypass valve closed
6/2/2010	9:24:24 AM	Bubbler valve closed
6/2/2010	9:24:24 AM	Helium valve opened
6/2/2010	9:24:24 AM	Helium MFC set to  500.000000
6/2/2010	9:24:24 AM	H2 MFC set to  0.000000
6/2/2010	9:24:24 AM	BCl3 MFC set to  0.000000
6/2/2010	9:24:24 AM	PHl3 MFC set to  0.000000
6/2/2010	9:24:24 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:24:24 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:24:24 AM	Tube furnace set to 0
6/2/2010	9:24:25 AM	Helium valve closed
6/2/2010	9:24:25 AM	H2 valve closed
6/2/2010	9:24:25 AM	BCl3 valve closed
6/2/2010	9:24:25 AM	PH3 valve closed
6/2/2010	9:24:25 AM	SiCl4 pre valve closed
6/2/2010	9:24:25 AM	SiCl4 post valve closed
6/2/2010	9:24:25 AM	Main Vac valve closed
6/2/2010	9:24:25 AM	Bypass valve closed
6/2/2010	9:24:25 AM	Bubbler valve closed
6/2/2010	9:24:25 AM	Helium MFC set to  0.000000
6/2/2010	9:24:25 AM	H2 MFC set to  0.000000
6/2/2010	9:24:25 AM	BCl3 MFC set to  0.000000
6/2/2010	9:24:25 AM	PHl3 MFC set to  0.000000
6/2/2010	9:24:25 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:24:25 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:24:25 AM	Tube furnace set to 0
6/2/2010	9:24:25 AM	Run finished at 9:24 AM
6/2/2010	9:24:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	9:27:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	9:27:21 AM	Recipe started at 9:27 AM
6/2/2010	9:27:21 AM	Helium valve closed
6/2/2010	9:27:21 AM	H2 valve closed
6/2/2010	9:27:21 AM	BCl3 valve closed
6/2/2010	9:27:21 AM	PH3 valve closed
6/2/2010	9:27:21 AM	SiCl4 pre valve closed
6/2/2010	9:27:21 AM	SiCl4 post valve closed
6/2/2010	9:27:21 AM	Main Vac valve closed
6/2/2010	9:27:21 AM	Bubbler valve closed
6/2/2010	9:27:21 AM	Bypass valve opened
6/2/2010	9:27:21 AM	Helium MFC set to  0.000000
6/2/2010	9:27:21 AM	H2 MFC set to  0.000000
6/2/2010	9:27:21 AM	BCl3 MFC set to  0.000000
6/2/2010	9:27:21 AM	PHl3 MFC set to  0.000000
6/2/2010	9:27:21 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:27:21 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:27:21 AM	Tube furnace set to 0
6/2/2010	9:28:30 AM	Run aborted at 9:28 AM
6/2/2010	9:28:30 AM	Helium valve closed
6/2/2010	9:28:30 AM	H2 valve closed
6/2/2010	9:28:30 AM	BCl3 valve closed
6/2/2010	9:28:30 AM	PH3 valve closed
6/2/2010	9:28:30 AM	SiCl4 pre valve closed
6/2/2010	9:28:30 AM	SiCl4 post valve closed
6/2/2010	9:28:30 AM	Bypass valve closed
6/2/2010	9:28:30 AM	Main Vac valve closed
6/2/2010	9:28:30 AM	Bubbler valve closed
6/2/2010	9:28:30 AM	Helium MFC set to  0.000000
6/2/2010	9:28:30 AM	H2 MFC set to  0.000000
6/2/2010	9:28:30 AM	BCl3 MFC set to  0.000000
6/2/2010	9:28:30 AM	PHl3 MFC set to  0.000000
6/2/2010	9:28:30 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:28:30 AM	Tube furnace set to 0
6/2/2010	9:28:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	9:28:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	9:28:33 AM	Recipe started at 9:28 AM
6/2/2010	9:28:33 AM	H2 valve closed
6/2/2010	9:28:33 AM	BCl3 valve closed
6/2/2010	9:28:33 AM	PH3 valve closed
6/2/2010	9:28:33 AM	SiCl4 pre valve closed
6/2/2010	9:28:33 AM	SiCl4 post valve closed
6/2/2010	9:28:33 AM	Main Vac valve closed
6/2/2010	9:28:33 AM	Bypass valve closed
6/2/2010	9:28:33 AM	Bubbler valve closed
6/2/2010	9:28:33 AM	Helium valve opened
6/2/2010	9:28:33 AM	Helium MFC set to  500.000000
6/2/2010	9:28:33 AM	H2 MFC set to  0.000000
6/2/2010	9:28:33 AM	BCl3 MFC set to  0.000000
6/2/2010	9:28:33 AM	PHl3 MFC set to  0.000000
6/2/2010	9:28:33 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:28:33 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:28:33 AM	Tube furnace set to 0
6/2/2010	9:28:38 AM	Helium valve closed
6/2/2010	9:28:38 AM	H2 valve closed
6/2/2010	9:28:38 AM	BCl3 valve closed
6/2/2010	9:28:38 AM	PH3 valve closed
6/2/2010	9:28:38 AM	SiCl4 pre valve closed
6/2/2010	9:28:38 AM	SiCl4 post valve closed
6/2/2010	9:28:38 AM	Main Vac valve closed
6/2/2010	9:28:38 AM	Bypass valve closed
6/2/2010	9:28:38 AM	Bubbler valve closed
6/2/2010	9:28:38 AM	Helium MFC set to  0.000000
6/2/2010	9:28:38 AM	H2 MFC set to  0.000000
6/2/2010	9:28:38 AM	BCl3 MFC set to  0.000000
6/2/2010	9:28:38 AM	PHl3 MFC set to  0.000000
6/2/2010	9:28:38 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:28:38 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:28:38 AM	Tube furnace set to 0
6/2/2010	9:28:38 AM	Run finished at 9:28 AM
6/2/2010	9:28:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	9:37:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	9:37:00 AM	Recipe started at 9:37 AM
6/2/2010	9:37:00 AM	Helium valve closed
6/2/2010	9:37:00 AM	H2 valve closed
6/2/2010	9:37:00 AM	BCl3 valve closed
6/2/2010	9:37:00 AM	PH3 valve closed
6/2/2010	9:37:00 AM	SiCl4 pre valve closed
6/2/2010	9:37:00 AM	SiCl4 post valve closed
6/2/2010	9:37:00 AM	Main Vac valve closed
6/2/2010	9:37:00 AM	Bubbler valve closed
6/2/2010	9:37:00 AM	Bypass valve opened
6/2/2010	9:37:00 AM	Helium MFC set to  0.000000
6/2/2010	9:37:00 AM	H2 MFC set to  0.000000
6/2/2010	9:37:00 AM	BCl3 MFC set to  0.000000
6/2/2010	9:37:00 AM	PHl3 MFC set to  0.000000
6/2/2010	9:37:00 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:37:00 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:37:01 AM	Tube furnace set to 0
6/2/2010	9:37:55 AM	Helium valve closed
6/2/2010	9:37:55 AM	H2 valve closed
6/2/2010	9:37:55 AM	BCl3 valve closed
6/2/2010	9:37:55 AM	PH3 valve closed
6/2/2010	9:37:55 AM	SiCl4 pre valve closed
6/2/2010	9:37:55 AM	SiCl4 post valve closed
6/2/2010	9:37:55 AM	Bubbler valve closed
6/2/2010	9:37:55 AM	Main Vac valve opened
6/2/2010	9:37:55 AM	Bypass valve opened
6/2/2010	9:37:55 AM	Helium MFC set to  0.000000
6/2/2010	9:37:55 AM	H2 MFC set to  0.000000
6/2/2010	9:37:55 AM	BCl3 MFC set to  0.000000
6/2/2010	9:37:55 AM	PHl3 MFC set to  0.000000
6/2/2010	9:37:55 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:37:55 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:37:55 AM	Tube furnace set to 0
6/2/2010	9:37:55 AM	Run finished at 9:37 AM
6/2/2010	9:37:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	9:38:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/2/2010	9:38:24 AM	Recipe started at 9:38 AM
6/2/2010	9:38:24 AM	H2 valve closed
6/2/2010	9:38:24 AM	BCl3 valve closed
6/2/2010	9:38:24 AM	PH3 valve closed
6/2/2010	9:38:24 AM	SiCl4 pre valve closed
6/2/2010	9:38:24 AM	SiCl4 post valve closed
6/2/2010	9:38:24 AM	Main Vac valve closed
6/2/2010	9:38:24 AM	Bypass valve closed
6/2/2010	9:38:24 AM	Bubbler valve closed
6/2/2010	9:38:24 AM	Helium valve opened
6/2/2010	9:38:24 AM	Helium MFC set to  500.000000
6/2/2010	9:38:24 AM	H2 MFC set to  0.000000
6/2/2010	9:38:24 AM	BCl3 MFC set to  0.000000
6/2/2010	9:38:24 AM	PHl3 MFC set to  0.000000
6/2/2010	9:38:24 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:38:24 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:38:24 AM	Tube furnace set to 0
6/2/2010	9:39:46 AM	Helium valve closed
6/2/2010	9:39:46 AM	H2 valve closed
6/2/2010	9:39:46 AM	BCl3 valve closed
6/2/2010	9:39:46 AM	PH3 valve closed
6/2/2010	9:39:46 AM	SiCl4 pre valve closed
6/2/2010	9:39:46 AM	SiCl4 post valve closed
6/2/2010	9:39:46 AM	Main Vac valve closed
6/2/2010	9:39:46 AM	Bypass valve closed
6/2/2010	9:39:46 AM	Bubbler valve closed
6/2/2010	9:39:46 AM	Helium MFC set to  0.000000
6/2/2010	9:39:46 AM	H2 MFC set to  0.000000
6/2/2010	9:39:46 AM	BCl3 MFC set to  0.000000
6/2/2010	9:39:46 AM	PHl3 MFC set to  0.000000
6/2/2010	9:39:46 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:39:46 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:39:46 AM	Tube furnace set to 0
6/2/2010	9:40:01 AM	Helium valve closed
6/2/2010	9:40:01 AM	H2 valve closed
6/2/2010	9:40:01 AM	BCl3 valve closed
6/2/2010	9:40:01 AM	PH3 valve closed
6/2/2010	9:40:01 AM	SiCl4 pre valve closed
6/2/2010	9:40:01 AM	SiCl4 post valve closed
6/2/2010	9:40:01 AM	Main Vac valve closed
6/2/2010	9:40:01 AM	Bubbler valve closed
6/2/2010	9:40:01 AM	Bypass valve opened
6/2/2010	9:40:01 AM	Helium MFC set to  0.000000
6/2/2010	9:40:01 AM	H2 MFC set to  0.000000
6/2/2010	9:40:01 AM	BCl3 MFC set to  0.000000
6/2/2010	9:40:01 AM	PHl3 MFC set to  0.000000
6/2/2010	9:40:01 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:40:01 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:40:01 AM	Tube furnace set to 0
6/2/2010	9:40:35 AM	Helium valve closed
6/2/2010	9:40:35 AM	H2 valve closed
6/2/2010	9:40:35 AM	BCl3 valve closed
6/2/2010	9:40:35 AM	PH3 valve closed
6/2/2010	9:40:35 AM	SiCl4 pre valve closed
6/2/2010	9:40:35 AM	SiCl4 post valve closed
6/2/2010	9:40:35 AM	Bubbler valve closed
6/2/2010	9:40:35 AM	Main Vac valve opened
6/2/2010	9:40:35 AM	Bypass valve opened
6/2/2010	9:40:35 AM	Helium MFC set to  0.000000
6/2/2010	9:40:35 AM	H2 MFC set to  0.000000
6/2/2010	9:40:35 AM	BCl3 MFC set to  0.000000
6/2/2010	9:40:35 AM	PHl3 MFC set to  0.000000
6/2/2010	9:40:35 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:40:35 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:40:35 AM	Tube furnace set to 0
6/2/2010	9:45:35 AM	H2 valve closed
6/2/2010	9:45:35 AM	BCl3 valve closed
6/2/2010	9:45:35 AM	PH3 valve closed
6/2/2010	9:45:36 AM	SiCl4 pre valve closed
6/2/2010	9:45:36 AM	SiCl4 post valve closed
6/2/2010	9:45:36 AM	Main Vac valve closed
6/2/2010	9:45:36 AM	Bypass valve closed
6/2/2010	9:45:36 AM	Bubbler valve closed
6/2/2010	9:45:36 AM	Helium valve opened
6/2/2010	9:45:36 AM	Helium MFC set to  500.000000
6/2/2010	9:45:36 AM	H2 MFC set to  0.000000
6/2/2010	9:45:36 AM	BCl3 MFC set to  0.000000
6/2/2010	9:45:36 AM	PHl3 MFC set to  0.000000
6/2/2010	9:45:36 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:45:36 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:45:36 AM	Tube furnace set to 0
6/2/2010	9:46:58 AM	Helium valve closed
6/2/2010	9:46:58 AM	H2 valve closed
6/2/2010	9:46:58 AM	BCl3 valve closed
6/2/2010	9:46:58 AM	PH3 valve closed
6/2/2010	9:46:58 AM	SiCl4 pre valve closed
6/2/2010	9:46:58 AM	SiCl4 post valve closed
6/2/2010	9:46:58 AM	Main Vac valve closed
6/2/2010	9:46:58 AM	Bypass valve closed
6/2/2010	9:46:58 AM	Bubbler valve closed
6/2/2010	9:46:58 AM	Helium MFC set to  0.000000
6/2/2010	9:46:58 AM	H2 MFC set to  0.000000
6/2/2010	9:46:58 AM	BCl3 MFC set to  0.000000
6/2/2010	9:46:58 AM	PHl3 MFC set to  0.000000
6/2/2010	9:46:58 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:46:58 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:46:58 AM	Tube furnace set to 0
6/2/2010	9:47:13 AM	Helium valve closed
6/2/2010	9:47:13 AM	H2 valve closed
6/2/2010	9:47:13 AM	BCl3 valve closed
6/2/2010	9:47:13 AM	PH3 valve closed
6/2/2010	9:47:13 AM	SiCl4 pre valve closed
6/2/2010	9:47:13 AM	SiCl4 post valve closed
6/2/2010	9:47:13 AM	Main Vac valve closed
6/2/2010	9:47:13 AM	Bubbler valve closed
6/2/2010	9:47:13 AM	Bypass valve opened
6/2/2010	9:47:13 AM	Helium MFC set to  0.000000
6/2/2010	9:47:13 AM	H2 MFC set to  0.000000
6/2/2010	9:47:13 AM	BCl3 MFC set to  0.000000
6/2/2010	9:47:13 AM	PHl3 MFC set to  0.000000
6/2/2010	9:47:13 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:47:13 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:47:13 AM	Tube furnace set to 0
6/2/2010	9:47:47 AM	Helium valve closed
6/2/2010	9:47:47 AM	H2 valve closed
6/2/2010	9:47:47 AM	BCl3 valve closed
6/2/2010	9:47:47 AM	PH3 valve closed
6/2/2010	9:47:47 AM	SiCl4 pre valve closed
6/2/2010	9:47:47 AM	SiCl4 post valve closed
6/2/2010	9:47:47 AM	Bubbler valve closed
6/2/2010	9:47:47 AM	Main Vac valve opened
6/2/2010	9:47:47 AM	Bypass valve opened
6/2/2010	9:47:47 AM	Helium MFC set to  0.000000
6/2/2010	9:47:47 AM	H2 MFC set to  0.000000
6/2/2010	9:47:47 AM	BCl3 MFC set to  0.000000
6/2/2010	9:47:47 AM	PHl3 MFC set to  0.000000
6/2/2010	9:47:47 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:47:47 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:47:47 AM	Tube furnace set to 0
6/2/2010	9:52:47 AM	H2 valve closed
6/2/2010	9:52:47 AM	BCl3 valve closed
6/2/2010	9:52:47 AM	PH3 valve closed
6/2/2010	9:52:47 AM	SiCl4 pre valve closed
6/2/2010	9:52:47 AM	SiCl4 post valve closed
6/2/2010	9:52:47 AM	Main Vac valve closed
6/2/2010	9:52:47 AM	Bypass valve closed
6/2/2010	9:52:47 AM	Bubbler valve closed
6/2/2010	9:52:47 AM	Helium valve opened
6/2/2010	9:52:47 AM	Helium MFC set to  500.000000
6/2/2010	9:52:47 AM	H2 MFC set to  0.000000
6/2/2010	9:52:47 AM	BCl3 MFC set to  0.000000
6/2/2010	9:52:47 AM	PHl3 MFC set to  0.000000
6/2/2010	9:52:47 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:52:47 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:52:47 AM	Tube furnace set to 0
6/2/2010	9:54:10 AM	Helium valve closed
6/2/2010	9:54:10 AM	H2 valve closed
6/2/2010	9:54:10 AM	BCl3 valve closed
6/2/2010	9:54:10 AM	PH3 valve closed
6/2/2010	9:54:10 AM	SiCl4 pre valve closed
6/2/2010	9:54:10 AM	SiCl4 post valve closed
6/2/2010	9:54:10 AM	Main Vac valve closed
6/2/2010	9:54:10 AM	Bypass valve closed
6/2/2010	9:54:10 AM	Bubbler valve closed
6/2/2010	9:54:10 AM	Helium MFC set to  0.000000
6/2/2010	9:54:10 AM	H2 MFC set to  0.000000
6/2/2010	9:54:10 AM	BCl3 MFC set to  0.000000
6/2/2010	9:54:10 AM	PHl3 MFC set to  0.000000
6/2/2010	9:54:10 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:54:10 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:54:10 AM	Tube furnace set to 0
6/2/2010	9:54:25 AM	Helium valve closed
6/2/2010	9:54:25 AM	H2 valve closed
6/2/2010	9:54:25 AM	BCl3 valve closed
6/2/2010	9:54:25 AM	PH3 valve closed
6/2/2010	9:54:25 AM	SiCl4 pre valve closed
6/2/2010	9:54:25 AM	SiCl4 post valve closed
6/2/2010	9:54:25 AM	Main Vac valve closed
6/2/2010	9:54:25 AM	Bubbler valve closed
6/2/2010	9:54:25 AM	Bypass valve opened
6/2/2010	9:54:25 AM	Helium MFC set to  0.000000
6/2/2010	9:54:25 AM	H2 MFC set to  0.000000
6/2/2010	9:54:25 AM	BCl3 MFC set to  0.000000
6/2/2010	9:54:25 AM	PHl3 MFC set to  0.000000
6/2/2010	9:54:25 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:54:25 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:54:25 AM	Tube furnace set to 0
6/2/2010	9:54:59 AM	Helium valve closed
6/2/2010	9:54:59 AM	H2 valve closed
6/2/2010	9:54:59 AM	BCl3 valve closed
6/2/2010	9:54:59 AM	PH3 valve closed
6/2/2010	9:54:59 AM	SiCl4 pre valve closed
6/2/2010	9:54:59 AM	SiCl4 post valve closed
6/2/2010	9:54:59 AM	Bubbler valve closed
6/2/2010	9:54:59 AM	Main Vac valve opened
6/2/2010	9:54:59 AM	Bypass valve opened
6/2/2010	9:54:59 AM	Helium MFC set to  0.000000
6/2/2010	9:54:59 AM	H2 MFC set to  0.000000
6/2/2010	9:54:59 AM	BCl3 MFC set to  0.000000
6/2/2010	9:54:59 AM	PHl3 MFC set to  0.000000
6/2/2010	9:54:59 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:54:59 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:54:59 AM	Tube furnace set to 0
6/2/2010	9:59:59 AM	Helium valve closed
6/2/2010	9:59:59 AM	H2 valve closed
6/2/2010	9:59:59 AM	BCl3 valve closed
6/2/2010	9:59:59 AM	PH3 valve closed
6/2/2010	9:59:59 AM	SiCl4 pre valve closed
6/2/2010	9:59:59 AM	SiCl4 post valve closed
6/2/2010	9:59:59 AM	Bubbler valve closed
6/2/2010	9:59:59 AM	Main Vac valve opened
6/2/2010	9:59:59 AM	Bypass valve opened
6/2/2010	9:59:59 AM	Helium MFC set to  0.000000
6/2/2010	9:59:59 AM	H2 MFC set to  0.000000
6/2/2010	9:59:59 AM	BCl3 MFC set to  0.000000
6/2/2010	9:59:59 AM	PHl3 MFC set to  0.000000
6/2/2010	9:59:59 AM	SiCl4 MFC set to  0.000000
6/2/2010	9:59:59 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	9:59:59 AM	Tube furnace set to 0
6/2/2010	10:00:00 AM	Run finished at 10:00 AM
6/2/2010	10:00:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/2/2010	10:12:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/2/2010	10:12:07 AM	Recipe started at 10:12 AM
6/2/2010	10:12:07 AM	H2 valve closed
6/2/2010	10:12:07 AM	BCl3 valve closed
6/2/2010	10:12:07 AM	PH3 valve closed
6/2/2010	10:12:07 AM	SiCl4 pre valve closed
6/2/2010	10:12:07 AM	SiCl4 post valve closed
6/2/2010	10:12:07 AM	Main Vac valve closed
6/2/2010	10:12:07 AM	Bypass valve closed
6/2/2010	10:12:07 AM	Bubbler valve closed
6/2/2010	10:12:07 AM	Helium valve opened
6/2/2010	10:12:07 AM	Helium MFC set to  500.000000
6/2/2010	10:12:07 AM	H2 MFC set to  0.000000
6/2/2010	10:12:07 AM	BCl3 MFC set to  0.000000
6/2/2010	10:12:07 AM	PHl3 MFC set to  0.000000
6/2/2010	10:12:07 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:12:07 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:12:08 AM	Tube furnace set to 0
6/2/2010	10:13:30 AM	Helium valve closed
6/2/2010	10:13:30 AM	H2 valve closed
6/2/2010	10:13:30 AM	BCl3 valve closed
6/2/2010	10:13:30 AM	PH3 valve closed
6/2/2010	10:13:30 AM	SiCl4 pre valve closed
6/2/2010	10:13:30 AM	SiCl4 post valve closed
6/2/2010	10:13:30 AM	Main Vac valve closed
6/2/2010	10:13:30 AM	Bypass valve closed
6/2/2010	10:13:30 AM	Bubbler valve closed
6/2/2010	10:13:30 AM	Helium MFC set to  0.000000
6/2/2010	10:13:30 AM	H2 MFC set to  0.000000
6/2/2010	10:13:30 AM	BCl3 MFC set to  0.000000
6/2/2010	10:13:30 AM	PHl3 MFC set to  0.000000
6/2/2010	10:13:30 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:13:30 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:13:30 AM	Tube furnace set to 0
6/2/2010	10:13:45 AM	Helium valve closed
6/2/2010	10:13:45 AM	H2 valve closed
6/2/2010	10:13:45 AM	BCl3 valve closed
6/2/2010	10:13:45 AM	PH3 valve closed
6/2/2010	10:13:45 AM	SiCl4 pre valve closed
6/2/2010	10:13:45 AM	SiCl4 post valve closed
6/2/2010	10:13:45 AM	Main Vac valve closed
6/2/2010	10:13:45 AM	Bubbler valve closed
6/2/2010	10:13:45 AM	Bypass valve opened
6/2/2010	10:13:45 AM	Helium MFC set to  0.000000
6/2/2010	10:13:45 AM	H2 MFC set to  0.000000
6/2/2010	10:13:45 AM	BCl3 MFC set to  0.000000
6/2/2010	10:13:45 AM	PHl3 MFC set to  0.000000
6/2/2010	10:13:45 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:13:45 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:13:45 AM	Tube furnace set to 0
6/2/2010	10:14:19 AM	Helium valve closed
6/2/2010	10:14:19 AM	H2 valve closed
6/2/2010	10:14:19 AM	BCl3 valve closed
6/2/2010	10:14:19 AM	PH3 valve closed
6/2/2010	10:14:19 AM	SiCl4 pre valve closed
6/2/2010	10:14:19 AM	SiCl4 post valve closed
6/2/2010	10:14:19 AM	Bubbler valve closed
6/2/2010	10:14:19 AM	Main Vac valve opened
6/2/2010	10:14:19 AM	Bypass valve opened
6/2/2010	10:14:19 AM	Helium MFC set to  0.000000
6/2/2010	10:14:19 AM	H2 MFC set to  0.000000
6/2/2010	10:14:19 AM	BCl3 MFC set to  0.000000
6/2/2010	10:14:19 AM	PHl3 MFC set to  0.000000
6/2/2010	10:14:19 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:14:19 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:14:19 AM	Tube furnace set to 0
6/2/2010	10:19:19 AM	H2 valve closed
6/2/2010	10:19:19 AM	BCl3 valve closed
6/2/2010	10:19:19 AM	PH3 valve closed
6/2/2010	10:19:19 AM	SiCl4 pre valve closed
6/2/2010	10:19:19 AM	SiCl4 post valve closed
6/2/2010	10:19:19 AM	Main Vac valve closed
6/2/2010	10:19:19 AM	Bypass valve closed
6/2/2010	10:19:19 AM	Bubbler valve closed
6/2/2010	10:19:19 AM	Helium valve opened
6/2/2010	10:19:19 AM	Helium MFC set to  500.000000
6/2/2010	10:19:19 AM	H2 MFC set to  0.000000
6/2/2010	10:19:19 AM	BCl3 MFC set to  0.000000
6/2/2010	10:19:19 AM	PHl3 MFC set to  0.000000
6/2/2010	10:19:19 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:19:19 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:19:19 AM	Tube furnace set to 0
6/2/2010	10:20:42 AM	Helium valve closed
6/2/2010	10:20:42 AM	H2 valve closed
6/2/2010	10:20:42 AM	BCl3 valve closed
6/2/2010	10:20:42 AM	PH3 valve closed
6/2/2010	10:20:42 AM	SiCl4 pre valve closed
6/2/2010	10:20:42 AM	SiCl4 post valve closed
6/2/2010	10:20:42 AM	Main Vac valve closed
6/2/2010	10:20:42 AM	Bypass valve closed
6/2/2010	10:20:42 AM	Bubbler valve closed
6/2/2010	10:20:42 AM	Helium MFC set to  0.000000
6/2/2010	10:20:42 AM	H2 MFC set to  0.000000
6/2/2010	10:20:42 AM	BCl3 MFC set to  0.000000
6/2/2010	10:20:42 AM	PHl3 MFC set to  0.000000
6/2/2010	10:20:42 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:20:42 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:20:42 AM	Tube furnace set to 0
6/2/2010	10:20:57 AM	Helium valve closed
6/2/2010	10:20:57 AM	H2 valve closed
6/2/2010	10:20:57 AM	BCl3 valve closed
6/2/2010	10:20:57 AM	PH3 valve closed
6/2/2010	10:20:57 AM	SiCl4 pre valve closed
6/2/2010	10:20:57 AM	SiCl4 post valve closed
6/2/2010	10:20:57 AM	Main Vac valve closed
6/2/2010	10:20:57 AM	Bubbler valve closed
6/2/2010	10:20:57 AM	Bypass valve opened
6/2/2010	10:20:57 AM	Helium MFC set to  0.000000
6/2/2010	10:20:57 AM	H2 MFC set to  0.000000
6/2/2010	10:20:57 AM	BCl3 MFC set to  0.000000
6/2/2010	10:20:57 AM	PHl3 MFC set to  0.000000
6/2/2010	10:20:57 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:20:57 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:20:57 AM	Tube furnace set to 0
6/2/2010	10:21:31 AM	Helium valve closed
6/2/2010	10:21:31 AM	H2 valve closed
6/2/2010	10:21:31 AM	BCl3 valve closed
6/2/2010	10:21:31 AM	PH3 valve closed
6/2/2010	10:21:31 AM	SiCl4 pre valve closed
6/2/2010	10:21:31 AM	SiCl4 post valve closed
6/2/2010	10:21:31 AM	Bubbler valve closed
6/2/2010	10:21:31 AM	Main Vac valve opened
6/2/2010	10:21:31 AM	Bypass valve opened
6/2/2010	10:21:31 AM	Helium MFC set to  0.000000
6/2/2010	10:21:31 AM	H2 MFC set to  0.000000
6/2/2010	10:21:31 AM	BCl3 MFC set to  0.000000
6/2/2010	10:21:31 AM	PHl3 MFC set to  0.000000
6/2/2010	10:21:31 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:21:31 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:21:31 AM	Tube furnace set to 0
6/2/2010	10:26:31 AM	H2 valve closed
6/2/2010	10:26:31 AM	BCl3 valve closed
6/2/2010	10:26:31 AM	PH3 valve closed
6/2/2010	10:26:31 AM	SiCl4 pre valve closed
6/2/2010	10:26:31 AM	SiCl4 post valve closed
6/2/2010	10:26:31 AM	Main Vac valve closed
6/2/2010	10:26:31 AM	Bypass valve closed
6/2/2010	10:26:31 AM	Bubbler valve closed
6/2/2010	10:26:31 AM	Helium valve opened
6/2/2010	10:26:31 AM	Helium MFC set to  500.000000
6/2/2010	10:26:31 AM	H2 MFC set to  0.000000
6/2/2010	10:26:31 AM	BCl3 MFC set to  0.000000
6/2/2010	10:26:31 AM	PHl3 MFC set to  0.000000
6/2/2010	10:26:31 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:26:31 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:26:31 AM	Tube furnace set to 0
6/2/2010	10:27:54 AM	Helium valve closed
6/2/2010	10:27:54 AM	H2 valve closed
6/2/2010	10:27:54 AM	BCl3 valve closed
6/2/2010	10:27:54 AM	PH3 valve closed
6/2/2010	10:27:54 AM	SiCl4 pre valve closed
6/2/2010	10:27:54 AM	SiCl4 post valve closed
6/2/2010	10:27:54 AM	Main Vac valve closed
6/2/2010	10:27:54 AM	Bypass valve closed
6/2/2010	10:27:54 AM	Bubbler valve closed
6/2/2010	10:27:54 AM	Helium MFC set to  0.000000
6/2/2010	10:27:54 AM	H2 MFC set to  0.000000
6/2/2010	10:27:54 AM	BCl3 MFC set to  0.000000
6/2/2010	10:27:54 AM	PHl3 MFC set to  0.000000
6/2/2010	10:27:54 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:27:54 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:27:54 AM	Tube furnace set to 0
6/2/2010	10:28:09 AM	Helium valve closed
6/2/2010	10:28:09 AM	H2 valve closed
6/2/2010	10:28:09 AM	BCl3 valve closed
6/2/2010	10:28:09 AM	PH3 valve closed
6/2/2010	10:28:09 AM	SiCl4 pre valve closed
6/2/2010	10:28:09 AM	SiCl4 post valve closed
6/2/2010	10:28:09 AM	Main Vac valve closed
6/2/2010	10:28:09 AM	Bubbler valve closed
6/2/2010	10:28:09 AM	Bypass valve opened
6/2/2010	10:28:09 AM	Helium MFC set to  0.000000
6/2/2010	10:28:09 AM	H2 MFC set to  0.000000
6/2/2010	10:28:09 AM	BCl3 MFC set to  0.000000
6/2/2010	10:28:09 AM	PHl3 MFC set to  0.000000
6/2/2010	10:28:09 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:28:09 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:28:09 AM	Tube furnace set to 0
6/2/2010	10:28:43 AM	Helium valve closed
6/2/2010	10:28:43 AM	H2 valve closed
6/2/2010	10:28:43 AM	BCl3 valve closed
6/2/2010	10:28:43 AM	PH3 valve closed
6/2/2010	10:28:43 AM	SiCl4 pre valve closed
6/2/2010	10:28:43 AM	SiCl4 post valve closed
6/2/2010	10:28:43 AM	Bubbler valve closed
6/2/2010	10:28:43 AM	Main Vac valve opened
6/2/2010	10:28:43 AM	Bypass valve opened
6/2/2010	10:28:43 AM	Helium MFC set to  0.000000
6/2/2010	10:28:43 AM	H2 MFC set to  0.000000
6/2/2010	10:28:43 AM	BCl3 MFC set to  0.000000
6/2/2010	10:28:43 AM	PHl3 MFC set to  0.000000
6/2/2010	10:28:43 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:28:43 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:28:43 AM	Tube furnace set to 0
6/2/2010	10:33:43 AM	Helium valve closed
6/2/2010	10:33:43 AM	H2 valve closed
6/2/2010	10:33:43 AM	BCl3 valve closed
6/2/2010	10:33:43 AM	PH3 valve closed
6/2/2010	10:33:43 AM	SiCl4 pre valve closed
6/2/2010	10:33:43 AM	SiCl4 post valve closed
6/2/2010	10:33:43 AM	Bubbler valve closed
6/2/2010	10:33:43 AM	Main Vac valve opened
6/2/2010	10:33:43 AM	Bypass valve opened
6/2/2010	10:33:43 AM	Helium MFC set to  0.000000
6/2/2010	10:33:43 AM	H2 MFC set to  0.000000
6/2/2010	10:33:43 AM	BCl3 MFC set to  0.000000
6/2/2010	10:33:43 AM	PHl3 MFC set to  0.000000
6/2/2010	10:33:43 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:33:43 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:33:43 AM	Tube furnace set to 0
6/2/2010	10:33:44 AM	Run finished at 10:33 AM
6/2/2010	10:33:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/2/2010	10:37:59 AM	Main Vac valve closed
6/2/2010	10:38:00 AM	Bypass valve closed
6/2/2010	10:38:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	10:38:11 AM	Recipe started at 10:38 AM
6/2/2010	10:38:11 AM	H2 valve closed
6/2/2010	10:38:11 AM	BCl3 valve closed
6/2/2010	10:38:11 AM	PH3 valve closed
6/2/2010	10:38:11 AM	SiCl4 pre valve closed
6/2/2010	10:38:11 AM	SiCl4 post valve closed
6/2/2010	10:38:11 AM	Main Vac valve closed
6/2/2010	10:38:11 AM	Bypass valve closed
6/2/2010	10:38:11 AM	Bubbler valve closed
6/2/2010	10:38:11 AM	Helium valve opened
6/2/2010	10:38:11 AM	Helium MFC set to  500.000000
6/2/2010	10:38:11 AM	H2 MFC set to  0.000000
6/2/2010	10:38:11 AM	BCl3 MFC set to  0.000000
6/2/2010	10:38:11 AM	PHl3 MFC set to  0.000000
6/2/2010	10:38:11 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:38:11 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:38:11 AM	Tube furnace set to 0
6/2/2010	10:39:31 AM	Helium valve closed
6/2/2010	10:39:31 AM	H2 valve closed
6/2/2010	10:39:31 AM	BCl3 valve closed
6/2/2010	10:39:31 AM	PH3 valve closed
6/2/2010	10:39:31 AM	SiCl4 pre valve closed
6/2/2010	10:39:31 AM	SiCl4 post valve closed
6/2/2010	10:39:31 AM	Main Vac valve closed
6/2/2010	10:39:31 AM	Bypass valve closed
6/2/2010	10:39:31 AM	Bubbler valve closed
6/2/2010	10:39:31 AM	Helium MFC set to  0.000000
6/2/2010	10:39:31 AM	H2 MFC set to  0.000000
6/2/2010	10:39:31 AM	BCl3 MFC set to  0.000000
6/2/2010	10:39:31 AM	PHl3 MFC set to  0.000000
6/2/2010	10:39:31 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:39:31 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:39:31 AM	Tube furnace set to 0
6/2/2010	10:39:31 AM	Run finished at 10:39 AM
6/2/2010	10:39:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	10:54:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	10:54:43 AM	Recipe started at 10:54 AM
6/2/2010	10:54:43 AM	Helium valve closed
6/2/2010	10:54:43 AM	H2 valve closed
6/2/2010	10:54:43 AM	BCl3 valve closed
6/2/2010	10:54:43 AM	PH3 valve closed
6/2/2010	10:54:43 AM	SiCl4 pre valve closed
6/2/2010	10:54:43 AM	SiCl4 post valve closed
6/2/2010	10:54:43 AM	Main Vac valve closed
6/2/2010	10:54:43 AM	Bubbler valve closed
6/2/2010	10:54:43 AM	Bypass valve opened
6/2/2010	10:54:43 AM	Helium MFC set to  0.000000
6/2/2010	10:54:43 AM	H2 MFC set to  0.000000
6/2/2010	10:54:43 AM	BCl3 MFC set to  0.000000
6/2/2010	10:54:43 AM	PHl3 MFC set to  0.000000
6/2/2010	10:54:43 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:54:43 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:54:43 AM	Tube furnace set to 0
6/2/2010	10:55:30 AM	Helium valve closed
6/2/2010	10:55:30 AM	H2 valve closed
6/2/2010	10:55:30 AM	BCl3 valve closed
6/2/2010	10:55:30 AM	PH3 valve closed
6/2/2010	10:55:30 AM	SiCl4 pre valve closed
6/2/2010	10:55:30 AM	SiCl4 post valve closed
6/2/2010	10:55:30 AM	Bubbler valve closed
6/2/2010	10:55:30 AM	Main Vac valve opened
6/2/2010	10:55:30 AM	Bypass valve opened
6/2/2010	10:55:30 AM	Helium MFC set to  0.000000
6/2/2010	10:55:30 AM	H2 MFC set to  0.000000
6/2/2010	10:55:30 AM	BCl3 MFC set to  0.000000
6/2/2010	10:55:30 AM	PHl3 MFC set to  0.000000
6/2/2010	10:55:30 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:55:30 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:55:30 AM	Tube furnace set to 0
6/2/2010	10:55:31 AM	Run finished at 10:55 AM
6/2/2010	10:55:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	10:56:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/2/2010	10:56:32 AM	Recipe started at 10:56 AM
6/2/2010	10:56:32 AM	H2 valve closed
6/2/2010	10:56:32 AM	BCl3 valve closed
6/2/2010	10:56:32 AM	PH3 valve closed
6/2/2010	10:56:32 AM	SiCl4 pre valve closed
6/2/2010	10:56:32 AM	SiCl4 post valve closed
6/2/2010	10:56:32 AM	Main Vac valve closed
6/2/2010	10:56:32 AM	Bypass valve closed
6/2/2010	10:56:32 AM	Bubbler valve closed
6/2/2010	10:56:32 AM	Helium valve opened
6/2/2010	10:56:32 AM	Helium MFC set to  500.000000
6/2/2010	10:56:32 AM	H2 MFC set to  0.000000
6/2/2010	10:56:32 AM	BCl3 MFC set to  0.000000
6/2/2010	10:56:32 AM	PHl3 MFC set to  0.000000
6/2/2010	10:56:32 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:56:32 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:56:32 AM	Tube furnace set to 0
6/2/2010	10:57:54 AM	Helium valve closed
6/2/2010	10:57:54 AM	H2 valve closed
6/2/2010	10:57:54 AM	BCl3 valve closed
6/2/2010	10:57:54 AM	PH3 valve closed
6/2/2010	10:57:54 AM	SiCl4 pre valve closed
6/2/2010	10:57:54 AM	SiCl4 post valve closed
6/2/2010	10:57:54 AM	Main Vac valve closed
6/2/2010	10:57:54 AM	Bypass valve closed
6/2/2010	10:57:54 AM	Bubbler valve closed
6/2/2010	10:57:54 AM	Helium MFC set to  0.000000
6/2/2010	10:57:54 AM	H2 MFC set to  0.000000
6/2/2010	10:57:54 AM	BCl3 MFC set to  0.000000
6/2/2010	10:57:54 AM	PHl3 MFC set to  0.000000
6/2/2010	10:57:54 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:57:54 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:57:55 AM	Tube furnace set to 0
6/2/2010	10:58:10 AM	Helium valve closed
6/2/2010	10:58:10 AM	H2 valve closed
6/2/2010	10:58:10 AM	BCl3 valve closed
6/2/2010	10:58:10 AM	PH3 valve closed
6/2/2010	10:58:10 AM	SiCl4 pre valve closed
6/2/2010	10:58:10 AM	SiCl4 post valve closed
6/2/2010	10:58:10 AM	Main Vac valve closed
6/2/2010	10:58:10 AM	Bubbler valve closed
6/2/2010	10:58:10 AM	Bypass valve opened
6/2/2010	10:58:10 AM	Helium MFC set to  0.000000
6/2/2010	10:58:10 AM	H2 MFC set to  0.000000
6/2/2010	10:58:10 AM	BCl3 MFC set to  0.000000
6/2/2010	10:58:10 AM	PHl3 MFC set to  0.000000
6/2/2010	10:58:10 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:58:10 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:58:10 AM	Tube furnace set to 0
6/2/2010	10:58:43 AM	Helium valve closed
6/2/2010	10:58:43 AM	H2 valve closed
6/2/2010	10:58:43 AM	BCl3 valve closed
6/2/2010	10:58:43 AM	PH3 valve closed
6/2/2010	10:58:43 AM	SiCl4 pre valve closed
6/2/2010	10:58:43 AM	SiCl4 post valve closed
6/2/2010	10:58:43 AM	Bubbler valve closed
6/2/2010	10:58:43 AM	Main Vac valve opened
6/2/2010	10:58:43 AM	Bypass valve opened
6/2/2010	10:58:43 AM	Helium MFC set to  0.000000
6/2/2010	10:58:43 AM	H2 MFC set to  0.000000
6/2/2010	10:58:43 AM	BCl3 MFC set to  0.000000
6/2/2010	10:58:43 AM	PHl3 MFC set to  0.000000
6/2/2010	10:58:43 AM	SiCl4 MFC set to  0.000000
6/2/2010	10:58:43 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	10:58:44 AM	Tube furnace set to 0
6/2/2010	11:03:44 AM	H2 valve closed
6/2/2010	11:03:44 AM	BCl3 valve closed
6/2/2010	11:03:44 AM	PH3 valve closed
6/2/2010	11:03:44 AM	SiCl4 pre valve closed
6/2/2010	11:03:44 AM	SiCl4 post valve closed
6/2/2010	11:03:44 AM	Main Vac valve closed
6/2/2010	11:03:44 AM	Bypass valve closed
6/2/2010	11:03:44 AM	Bubbler valve closed
6/2/2010	11:03:44 AM	Helium valve opened
6/2/2010	11:03:44 AM	Helium MFC set to  500.000000
6/2/2010	11:03:44 AM	H2 MFC set to  0.000000
6/2/2010	11:03:44 AM	BCl3 MFC set to  0.000000
6/2/2010	11:03:44 AM	PHl3 MFC set to  0.000000
6/2/2010	11:03:44 AM	SiCl4 MFC set to  0.000000
6/2/2010	11:03:44 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	11:03:44 AM	Tube furnace set to 0
6/2/2010	11:05:06 AM	Helium valve closed
6/2/2010	11:05:06 AM	H2 valve closed
6/2/2010	11:05:06 AM	BCl3 valve closed
6/2/2010	11:05:06 AM	PH3 valve closed
6/2/2010	11:05:06 AM	SiCl4 pre valve closed
6/2/2010	11:05:06 AM	SiCl4 post valve closed
6/2/2010	11:05:06 AM	Main Vac valve closed
6/2/2010	11:05:06 AM	Bypass valve closed
6/2/2010	11:05:06 AM	Bubbler valve closed
6/2/2010	11:05:06 AM	Helium MFC set to  0.000000
6/2/2010	11:05:06 AM	H2 MFC set to  0.000000
6/2/2010	11:05:06 AM	BCl3 MFC set to  0.000000
6/2/2010	11:05:06 AM	PHl3 MFC set to  0.000000
6/2/2010	11:05:06 AM	SiCl4 MFC set to  0.000000
6/2/2010	11:05:06 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	11:05:06 AM	Tube furnace set to 0
6/2/2010	11:05:21 AM	Helium valve closed
6/2/2010	11:05:21 AM	H2 valve closed
6/2/2010	11:05:21 AM	BCl3 valve closed
6/2/2010	11:05:21 AM	PH3 valve closed
6/2/2010	11:05:21 AM	SiCl4 pre valve closed
6/2/2010	11:05:21 AM	SiCl4 post valve closed
6/2/2010	11:05:21 AM	Main Vac valve closed
6/2/2010	11:05:21 AM	Bubbler valve closed
6/2/2010	11:05:21 AM	Bypass valve opened
6/2/2010	11:05:21 AM	Helium MFC set to  0.000000
6/2/2010	11:05:21 AM	H2 MFC set to  0.000000
6/2/2010	11:05:21 AM	BCl3 MFC set to  0.000000
6/2/2010	11:05:21 AM	PHl3 MFC set to  0.000000
6/2/2010	11:05:21 AM	SiCl4 MFC set to  0.000000
6/2/2010	11:05:21 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	11:05:21 AM	Tube furnace set to 0
6/2/2010	11:05:55 AM	Helium valve closed
6/2/2010	11:05:55 AM	H2 valve closed
6/2/2010	11:05:55 AM	BCl3 valve closed
6/2/2010	11:05:55 AM	PH3 valve closed
6/2/2010	11:05:55 AM	SiCl4 pre valve closed
6/2/2010	11:05:55 AM	SiCl4 post valve closed
6/2/2010	11:05:55 AM	Bubbler valve closed
6/2/2010	11:05:55 AM	Main Vac valve opened
6/2/2010	11:05:55 AM	Bypass valve opened
6/2/2010	11:05:55 AM	Helium MFC set to  0.000000
6/2/2010	11:05:55 AM	H2 MFC set to  0.000000
6/2/2010	11:05:55 AM	BCl3 MFC set to  0.000000
6/2/2010	11:05:55 AM	PHl3 MFC set to  0.000000
6/2/2010	11:05:55 AM	SiCl4 MFC set to  0.000000
6/2/2010	11:05:55 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	11:05:55 AM	Tube furnace set to 0
6/2/2010	11:06:34 AM	Run aborted at 11:06 AM
6/2/2010	11:06:34 AM	Helium valve closed
6/2/2010	11:06:34 AM	H2 valve closed
6/2/2010	11:06:34 AM	BCl3 valve closed
6/2/2010	11:06:34 AM	PH3 valve closed
6/2/2010	11:06:34 AM	SiCl4 pre valve closed
6/2/2010	11:06:34 AM	SiCl4 post valve closed
6/2/2010	11:06:34 AM	Bypass valve closed
6/2/2010	11:06:34 AM	Main Vac valve closed
6/2/2010	11:06:34 AM	Bubbler valve closed
6/2/2010	11:06:34 AM	Helium MFC set to  0.000000
6/2/2010	11:06:34 AM	H2 MFC set to  0.000000
6/2/2010	11:06:34 AM	BCl3 MFC set to  0.000000
6/2/2010	11:06:34 AM	PHl3 MFC set to  0.000000
6/2/2010	11:06:34 AM	SiCl4 MFC set to  0.000000
6/2/2010	11:06:34 AM	Tube furnace set to 0
6/2/2010	11:06:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/2/2010	11:06:36 AM	Bypass valve closed
6/2/2010	11:06:38 AM	Bypass valve opened
6/2/2010	11:06:40 AM	Bypass valve closed
6/2/2010	11:06:45 AM	Bypass valve opened
6/2/2010	11:06:46 AM	Main Vac valve closed
6/2/2010	11:06:49 AM	Main Vac valve opened
6/2/2010	11:06:56 AM	Helium MFC set to  100.000000
6/2/2010	11:06:57 AM	Helium valve opened
6/2/2010	11:07:04 AM	Helium MFC set to  500.000000
6/2/2010	11:07:34 AM	Helium valve closed
6/2/2010	11:08:00 AM	Helium valve opened
6/2/2010	11:09:47 AM	Helium valve closed
6/2/2010	11:10:19 AM	Helium valve opened
6/2/2010	11:14:27 AM	Helium valve closed
6/2/2010	11:14:37 AM	Helium MFC set to  500.000000
6/2/2010	11:14:40 AM	Helium MFC set to  0.000000
6/2/2010	11:15:13 AM	Helium MFC set to  500.000000
6/2/2010	11:15:14 AM	Helium valve opened
6/2/2010	11:20:38 AM	Helium MFC set to  0.000000
6/2/2010	11:20:40 AM	Helium valve closed
6/2/2010	11:21:56 AM	Bypass valve closed
6/2/2010	11:21:56 AM	Main Vac valve closed
6/2/2010	11:22:13 AM	Bypass valve opened
6/2/2010	11:22:14 AM	Main Vac valve opened
6/2/2010	11:22:18 AM	Helium MFC set to  500.000000
6/2/2010	11:22:19 AM	Helium valve opened
6/2/2010	11:27:02 AM	Helium MFC set to  0.000000
6/2/2010	11:27:03 AM	Helium valve closed
6/2/2010	11:28:25 AM	Recipe started at 11:28 AM
6/2/2010	11:28:25 AM	Helium valve closed
6/2/2010	11:28:25 AM	BCl3 valve closed
6/2/2010	11:28:25 AM	PH3 valve closed
6/2/2010	11:28:25 AM	SiCl4 pre valve closed
6/2/2010	11:28:25 AM	SiCl4 post valve closed
6/2/2010	11:28:25 AM	Main Vac valve closed
6/2/2010	11:28:25 AM	Bypass valve closed
6/2/2010	11:28:25 AM	Bubbler valve closed
6/2/2010	11:28:25 AM	H2 valve opened
6/2/2010	11:28:25 AM	Helium MFC set to  0.000000
6/2/2010	11:28:25 AM	H2 MFC set to  500.000000
6/2/2010	11:28:25 AM	BCl3 MFC set to  0.000000
6/2/2010	11:28:25 AM	PHl3 MFC set to  0.000000
6/2/2010	11:28:25 AM	SiCl4 MFC set to  0.000000
6/2/2010	11:28:25 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	11:28:26 AM	Tube furnace set to 0
6/2/2010	11:29:48 AM	Helium valve closed
6/2/2010	11:29:48 AM	BCl3 valve closed
6/2/2010	11:29:48 AM	PH3 valve closed
6/2/2010	11:29:48 AM	SiCl4 pre valve closed
6/2/2010	11:29:48 AM	SiCl4 post valve closed
6/2/2010	11:29:48 AM	Main Vac valve closed
6/2/2010	11:29:48 AM	Bypass valve closed
6/2/2010	11:29:48 AM	H2 valve opened
6/2/2010	11:29:48 AM	Bubbler valve opened
6/2/2010	11:29:48 AM	Helium MFC set to  0.000000
6/2/2010	11:29:48 AM	H2 MFC set to  500.000000
6/2/2010	11:29:48 AM	BCl3 MFC set to  0.000000
6/2/2010	11:29:48 AM	PHl3 MFC set to  0.000000
6/2/2010	11:29:48 AM	SiCl4 MFC set to  0.000000
6/2/2010	11:29:48 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	11:29:48 AM	Tube furnace set to 1000
6/2/2010	11:49:48 AM	Helium valve closed
6/2/2010	11:49:48 AM	PH3 valve closed
6/2/2010	11:49:48 AM	Main Vac valve closed
6/2/2010	11:49:48 AM	Bypass valve closed
6/2/2010	11:49:48 AM	H2 valve opened
6/2/2010	11:49:48 AM	BCl3 valve opened
6/2/2010	11:49:48 AM	SiCl4 pre valve opened
6/2/2010	11:49:48 AM	SiCl4 post valve opened
6/2/2010	11:49:48 AM	Bubbler valve opened
6/2/2010	11:49:48 AM	Helium MFC set to  0.000000
6/2/2010	11:49:48 AM	H2 MFC set to  500.000000
6/2/2010	11:49:48 AM	BCl3 MFC set to  35.000000
6/2/2010	11:49:48 AM	PHl3 MFC set to  0.000000
6/2/2010	11:49:48 AM	SiCl4 MFC set to  50.000000
6/2/2010	11:49:48 AM	Bypass solenoid MFC set to  0.000000
6/2/2010	11:49:48 AM	Tube furnace set to 1000
6/2/2010	12:04:48 PM	H2 valve closed
6/2/2010	12:04:48 PM	BCl3 valve closed
6/2/2010	12:04:48 PM	PH3 valve closed
6/2/2010	12:04:48 PM	SiCl4 pre valve closed
6/2/2010	12:04:48 PM	SiCl4 post valve closed
6/2/2010	12:04:48 PM	Main Vac valve closed
6/2/2010	12:04:48 PM	Bypass valve closed
6/2/2010	12:04:48 PM	Helium valve opened
6/2/2010	12:04:48 PM	Bubbler valve opened
6/2/2010	12:04:49 PM	Helium MFC set to  500.000000
6/2/2010	12:04:49 PM	H2 MFC set to  0.000000
6/2/2010	12:04:49 PM	BCl3 MFC set to  0.000000
6/2/2010	12:04:49 PM	PHl3 MFC set to  0.000000
6/2/2010	12:04:49 PM	SiCl4 MFC set to  0.000000
6/2/2010	12:04:49 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	12:04:49 PM	Tube furnace set to 0
6/2/2010	12:24:49 PM	Helium valve closed
6/2/2010	12:24:49 PM	H2 valve closed
6/2/2010	12:24:49 PM	BCl3 valve closed
6/2/2010	12:24:49 PM	PH3 valve closed
6/2/2010	12:24:49 PM	SiCl4 pre valve closed
6/2/2010	12:24:49 PM	SiCl4 post valve closed
6/2/2010	12:24:49 PM	Main Vac valve closed
6/2/2010	12:24:49 PM	Bypass valve closed
6/2/2010	12:24:49 PM	Bubbler valve closed
6/2/2010	12:24:49 PM	Helium MFC set to  0.000000
6/2/2010	12:24:49 PM	H2 MFC set to  0.000000
6/2/2010	12:24:49 PM	BCl3 MFC set to  0.000000
6/2/2010	12:24:49 PM	PHl3 MFC set to  0.000000
6/2/2010	12:24:49 PM	SiCl4 MFC set to  0.000000
6/2/2010	12:24:49 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	12:24:49 PM	Tube furnace set to 0
6/2/2010	12:24:49 PM	Run finished at 12:24 PM
6/2/2010	1:00:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	1:00:38 PM	Recipe started at 1:00 PM
6/2/2010	1:00:38 PM	H2 valve closed
6/2/2010	1:00:38 PM	BCl3 valve closed
6/2/2010	1:00:38 PM	PH3 valve closed
6/2/2010	1:00:38 PM	SiCl4 pre valve closed
6/2/2010	1:00:38 PM	SiCl4 post valve closed
6/2/2010	1:00:38 PM	Main Vac valve closed
6/2/2010	1:00:38 PM	Bypass valve closed
6/2/2010	1:00:38 PM	Bubbler valve closed
6/2/2010	1:00:38 PM	Helium valve opened
6/2/2010	1:00:39 PM	Helium MFC set to  500.000000
6/2/2010	1:00:39 PM	H2 MFC set to  0.000000
6/2/2010	1:00:39 PM	BCl3 MFC set to  0.000000
6/2/2010	1:00:39 PM	PHl3 MFC set to  0.000000
6/2/2010	1:00:39 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:00:39 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:00:39 PM	Tube furnace set to 0
6/2/2010	1:00:39 PM	Helium valve closed
6/2/2010	1:00:39 PM	H2 valve closed
6/2/2010	1:00:39 PM	BCl3 valve closed
6/2/2010	1:00:39 PM	PH3 valve closed
6/2/2010	1:00:39 PM	SiCl4 pre valve closed
6/2/2010	1:00:39 PM	SiCl4 post valve closed
6/2/2010	1:00:39 PM	Main Vac valve closed
6/2/2010	1:00:39 PM	Bypass valve closed
6/2/2010	1:00:39 PM	Bubbler valve closed
6/2/2010	1:00:39 PM	Helium MFC set to  0.000000
6/2/2010	1:00:39 PM	H2 MFC set to  0.000000
6/2/2010	1:00:39 PM	BCl3 MFC set to  0.000000
6/2/2010	1:00:39 PM	PHl3 MFC set to  0.000000
6/2/2010	1:00:39 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:00:39 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:00:40 PM	Tube furnace set to 0
6/2/2010	1:00:40 PM	Run finished at 1:00 PM
6/2/2010	1:00:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	1:20:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	1:20:04 PM	Recipe started at 1:20 PM
6/2/2010	1:20:04 PM	H2 valve closed
6/2/2010	1:20:04 PM	BCl3 valve closed
6/2/2010	1:20:04 PM	PH3 valve closed
6/2/2010	1:20:04 PM	SiCl4 pre valve closed
6/2/2010	1:20:04 PM	SiCl4 post valve closed
6/2/2010	1:20:04 PM	Main Vac valve closed
6/2/2010	1:20:04 PM	Bypass valve closed
6/2/2010	1:20:04 PM	Bubbler valve closed
6/2/2010	1:20:04 PM	Helium valve opened
6/2/2010	1:20:04 PM	Helium MFC set to  500.000000
6/2/2010	1:20:04 PM	H2 MFC set to  0.000000
6/2/2010	1:20:04 PM	BCl3 MFC set to  0.000000
6/2/2010	1:20:04 PM	PHl3 MFC set to  0.000000
6/2/2010	1:20:04 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:20:04 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:20:04 PM	Tube furnace set to 0
6/2/2010	1:20:11 PM	Helium valve closed
6/2/2010	1:20:11 PM	H2 valve closed
6/2/2010	1:20:11 PM	BCl3 valve closed
6/2/2010	1:20:11 PM	PH3 valve closed
6/2/2010	1:20:11 PM	SiCl4 pre valve closed
6/2/2010	1:20:11 PM	SiCl4 post valve closed
6/2/2010	1:20:11 PM	Main Vac valve closed
6/2/2010	1:20:11 PM	Bypass valve closed
6/2/2010	1:20:11 PM	Bubbler valve closed
6/2/2010	1:20:11 PM	Helium MFC set to  0.000000
6/2/2010	1:20:11 PM	H2 MFC set to  0.000000
6/2/2010	1:20:11 PM	BCl3 MFC set to  0.000000
6/2/2010	1:20:11 PM	PHl3 MFC set to  0.000000
6/2/2010	1:20:11 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:20:11 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:20:11 PM	Tube furnace set to 0
6/2/2010	1:20:11 PM	Run finished at 1:20 PM
6/2/2010	1:20:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	1:31:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	1:31:50 PM	Recipe started at 1:31 PM
6/2/2010	1:31:50 PM	H2 valve closed
6/2/2010	1:31:50 PM	BCl3 valve closed
6/2/2010	1:31:50 PM	PH3 valve closed
6/2/2010	1:31:50 PM	SiCl4 pre valve closed
6/2/2010	1:31:50 PM	SiCl4 post valve closed
6/2/2010	1:31:50 PM	Main Vac valve closed
6/2/2010	1:31:50 PM	Bypass valve closed
6/2/2010	1:31:50 PM	Bubbler valve closed
6/2/2010	1:31:50 PM	Helium valve opened
6/2/2010	1:31:50 PM	Helium MFC set to  500.000000
6/2/2010	1:31:50 PM	H2 MFC set to  0.000000
6/2/2010	1:31:50 PM	BCl3 MFC set to  0.000000
6/2/2010	1:31:50 PM	PHl3 MFC set to  0.000000
6/2/2010	1:31:50 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:31:50 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:31:50 PM	Tube furnace set to 0
6/2/2010	1:31:50 PM	Helium valve closed
6/2/2010	1:31:50 PM	H2 valve closed
6/2/2010	1:31:50 PM	BCl3 valve closed
6/2/2010	1:31:50 PM	PH3 valve closed
6/2/2010	1:31:50 PM	SiCl4 pre valve closed
6/2/2010	1:31:50 PM	SiCl4 post valve closed
6/2/2010	1:31:50 PM	Main Vac valve closed
6/2/2010	1:31:50 PM	Bypass valve closed
6/2/2010	1:31:50 PM	Bubbler valve closed
6/2/2010	1:31:50 PM	Helium MFC set to  0.000000
6/2/2010	1:31:50 PM	H2 MFC set to  0.000000
6/2/2010	1:31:50 PM	BCl3 MFC set to  0.000000
6/2/2010	1:31:50 PM	PHl3 MFC set to  0.000000
6/2/2010	1:31:50 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:31:50 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:31:50 PM	Tube furnace set to 0
6/2/2010	1:31:51 PM	Run finished at 1:31 PM
6/2/2010	1:31:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	1:31:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	1:31:54 PM	Recipe started at 1:31 PM
6/2/2010	1:31:54 PM	Helium valve closed
6/2/2010	1:31:54 PM	H2 valve closed
6/2/2010	1:31:54 PM	BCl3 valve closed
6/2/2010	1:31:54 PM	PH3 valve closed
6/2/2010	1:31:54 PM	SiCl4 pre valve closed
6/2/2010	1:31:54 PM	SiCl4 post valve closed
6/2/2010	1:31:54 PM	Main Vac valve closed
6/2/2010	1:31:54 PM	Bubbler valve closed
6/2/2010	1:31:54 PM	Bypass valve opened
6/2/2010	1:31:54 PM	Helium MFC set to  0.000000
6/2/2010	1:31:54 PM	H2 MFC set to  0.000000
6/2/2010	1:31:54 PM	BCl3 MFC set to  0.000000
6/2/2010	1:31:54 PM	PHl3 MFC set to  0.000000
6/2/2010	1:31:54 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:31:54 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:31:54 PM	Tube furnace set to 0
6/2/2010	1:32:43 PM	Helium valve closed
6/2/2010	1:32:43 PM	H2 valve closed
6/2/2010	1:32:43 PM	BCl3 valve closed
6/2/2010	1:32:43 PM	PH3 valve closed
6/2/2010	1:32:43 PM	SiCl4 pre valve closed
6/2/2010	1:32:43 PM	SiCl4 post valve closed
6/2/2010	1:32:43 PM	Bubbler valve closed
6/2/2010	1:32:43 PM	Main Vac valve opened
6/2/2010	1:32:43 PM	Bypass valve opened
6/2/2010	1:32:43 PM	Helium MFC set to  0.000000
6/2/2010	1:32:43 PM	H2 MFC set to  0.000000
6/2/2010	1:32:43 PM	BCl3 MFC set to  0.000000
6/2/2010	1:32:43 PM	PHl3 MFC set to  0.000000
6/2/2010	1:32:43 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:32:43 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:32:43 PM	Tube furnace set to 0
6/2/2010	1:32:43 PM	Run finished at 1:32 PM
6/2/2010	1:32:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	1:33:36 PM	Helium MFC set to  500.000000
6/2/2010	1:33:38 PM	Helium valve opened
6/2/2010	1:34:23 PM	Helium MFC set to  0.000000
6/2/2010	1:34:24 PM	Helium valve closed
6/2/2010	1:34:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/2/2010	1:34:53 PM	Recipe started at 1:34 PM
6/2/2010	1:34:53 PM	H2 valve closed
6/2/2010	1:34:53 PM	BCl3 valve closed
6/2/2010	1:34:53 PM	PH3 valve closed
6/2/2010	1:34:53 PM	SiCl4 pre valve closed
6/2/2010	1:34:53 PM	SiCl4 post valve closed
6/2/2010	1:34:53 PM	Main Vac valve closed
6/2/2010	1:34:53 PM	Bypass valve closed
6/2/2010	1:34:53 PM	Bubbler valve closed
6/2/2010	1:34:53 PM	Helium valve opened
6/2/2010	1:34:53 PM	Helium MFC set to  500.000000
6/2/2010	1:34:53 PM	H2 MFC set to  0.000000
6/2/2010	1:34:53 PM	BCl3 MFC set to  0.000000
6/2/2010	1:34:53 PM	PHl3 MFC set to  0.000000
6/2/2010	1:34:53 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:34:53 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:34:54 PM	Tube furnace set to 0
6/2/2010	1:36:14 PM	Helium valve closed
6/2/2010	1:36:14 PM	H2 valve closed
6/2/2010	1:36:14 PM	BCl3 valve closed
6/2/2010	1:36:14 PM	PH3 valve closed
6/2/2010	1:36:14 PM	SiCl4 pre valve closed
6/2/2010	1:36:14 PM	SiCl4 post valve closed
6/2/2010	1:36:14 PM	Main Vac valve closed
6/2/2010	1:36:14 PM	Bypass valve closed
6/2/2010	1:36:14 PM	Bubbler valve closed
6/2/2010	1:36:14 PM	Helium MFC set to  0.000000
6/2/2010	1:36:14 PM	H2 MFC set to  0.000000
6/2/2010	1:36:14 PM	BCl3 MFC set to  0.000000
6/2/2010	1:36:14 PM	PHl3 MFC set to  0.000000
6/2/2010	1:36:14 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:36:14 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:36:15 PM	Tube furnace set to 0
6/2/2010	1:36:30 PM	Helium valve closed
6/2/2010	1:36:30 PM	H2 valve closed
6/2/2010	1:36:30 PM	BCl3 valve closed
6/2/2010	1:36:30 PM	PH3 valve closed
6/2/2010	1:36:30 PM	SiCl4 pre valve closed
6/2/2010	1:36:30 PM	SiCl4 post valve closed
6/2/2010	1:36:30 PM	Main Vac valve closed
6/2/2010	1:36:30 PM	Bubbler valve closed
6/2/2010	1:36:30 PM	Bypass valve opened
6/2/2010	1:36:30 PM	Helium MFC set to  0.000000
6/2/2010	1:36:30 PM	H2 MFC set to  0.000000
6/2/2010	1:36:30 PM	BCl3 MFC set to  0.000000
6/2/2010	1:36:30 PM	PHl3 MFC set to  0.000000
6/2/2010	1:36:30 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:36:30 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:36:30 PM	Tube furnace set to 0
6/2/2010	1:37:03 PM	Helium valve closed
6/2/2010	1:37:03 PM	H2 valve closed
6/2/2010	1:37:03 PM	BCl3 valve closed
6/2/2010	1:37:03 PM	PH3 valve closed
6/2/2010	1:37:03 PM	SiCl4 pre valve closed
6/2/2010	1:37:03 PM	SiCl4 post valve closed
6/2/2010	1:37:03 PM	Bubbler valve closed
6/2/2010	1:37:03 PM	Main Vac valve opened
6/2/2010	1:37:03 PM	Bypass valve opened
6/2/2010	1:37:03 PM	Helium MFC set to  0.000000
6/2/2010	1:37:03 PM	H2 MFC set to  0.000000
6/2/2010	1:37:03 PM	BCl3 MFC set to  0.000000
6/2/2010	1:37:03 PM	PHl3 MFC set to  0.000000
6/2/2010	1:37:03 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:37:03 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:37:03 PM	Tube furnace set to 0
6/2/2010	1:42:03 PM	H2 valve closed
6/2/2010	1:42:03 PM	BCl3 valve closed
6/2/2010	1:42:03 PM	PH3 valve closed
6/2/2010	1:42:03 PM	SiCl4 pre valve closed
6/2/2010	1:42:03 PM	SiCl4 post valve closed
6/2/2010	1:42:03 PM	Main Vac valve closed
6/2/2010	1:42:03 PM	Bypass valve closed
6/2/2010	1:42:03 PM	Bubbler valve closed
6/2/2010	1:42:03 PM	Helium valve opened
6/2/2010	1:42:03 PM	Helium MFC set to  500.000000
6/2/2010	1:42:03 PM	H2 MFC set to  0.000000
6/2/2010	1:42:03 PM	BCl3 MFC set to  0.000000
6/2/2010	1:42:03 PM	PHl3 MFC set to  0.000000
6/2/2010	1:42:03 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:42:03 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:42:03 PM	Tube furnace set to 0
6/2/2010	1:43:23 PM	Helium valve closed
6/2/2010	1:43:23 PM	H2 valve closed
6/2/2010	1:43:23 PM	BCl3 valve closed
6/2/2010	1:43:23 PM	PH3 valve closed
6/2/2010	1:43:23 PM	SiCl4 pre valve closed
6/2/2010	1:43:23 PM	SiCl4 post valve closed
6/2/2010	1:43:23 PM	Main Vac valve closed
6/2/2010	1:43:23 PM	Bypass valve closed
6/2/2010	1:43:23 PM	Bubbler valve closed
6/2/2010	1:43:23 PM	Helium MFC set to  0.000000
6/2/2010	1:43:23 PM	H2 MFC set to  0.000000
6/2/2010	1:43:23 PM	BCl3 MFC set to  0.000000
6/2/2010	1:43:23 PM	PHl3 MFC set to  0.000000
6/2/2010	1:43:23 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:43:23 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:43:24 PM	Tube furnace set to 0
6/2/2010	1:43:39 PM	Helium valve closed
6/2/2010	1:43:39 PM	H2 valve closed
6/2/2010	1:43:39 PM	BCl3 valve closed
6/2/2010	1:43:39 PM	PH3 valve closed
6/2/2010	1:43:39 PM	SiCl4 pre valve closed
6/2/2010	1:43:39 PM	SiCl4 post valve closed
6/2/2010	1:43:39 PM	Main Vac valve closed
6/2/2010	1:43:39 PM	Bubbler valve closed
6/2/2010	1:43:39 PM	Bypass valve opened
6/2/2010	1:43:39 PM	Helium MFC set to  0.000000
6/2/2010	1:43:39 PM	H2 MFC set to  0.000000
6/2/2010	1:43:39 PM	BCl3 MFC set to  0.000000
6/2/2010	1:43:39 PM	PHl3 MFC set to  0.000000
6/2/2010	1:43:39 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:43:39 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:43:39 PM	Tube furnace set to 0
6/2/2010	1:44:12 PM	Helium valve closed
6/2/2010	1:44:12 PM	H2 valve closed
6/2/2010	1:44:12 PM	BCl3 valve closed
6/2/2010	1:44:12 PM	PH3 valve closed
6/2/2010	1:44:12 PM	SiCl4 pre valve closed
6/2/2010	1:44:12 PM	SiCl4 post valve closed
6/2/2010	1:44:12 PM	Bubbler valve closed
6/2/2010	1:44:12 PM	Main Vac valve opened
6/2/2010	1:44:12 PM	Bypass valve opened
6/2/2010	1:44:12 PM	Helium MFC set to  0.000000
6/2/2010	1:44:12 PM	H2 MFC set to  0.000000
6/2/2010	1:44:12 PM	BCl3 MFC set to  0.000000
6/2/2010	1:44:12 PM	PHl3 MFC set to  0.000000
6/2/2010	1:44:12 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:44:12 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:44:12 PM	Tube furnace set to 0
6/2/2010	1:49:12 PM	H2 valve closed
6/2/2010	1:49:12 PM	BCl3 valve closed
6/2/2010	1:49:12 PM	PH3 valve closed
6/2/2010	1:49:12 PM	SiCl4 pre valve closed
6/2/2010	1:49:12 PM	SiCl4 post valve closed
6/2/2010	1:49:12 PM	Main Vac valve closed
6/2/2010	1:49:12 PM	Bypass valve closed
6/2/2010	1:49:12 PM	Bubbler valve closed
6/2/2010	1:49:12 PM	Helium valve opened
6/2/2010	1:49:12 PM	Helium MFC set to  500.000000
6/2/2010	1:49:12 PM	H2 MFC set to  0.000000
6/2/2010	1:49:12 PM	BCl3 MFC set to  0.000000
6/2/2010	1:49:12 PM	PHl3 MFC set to  0.000000
6/2/2010	1:49:12 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:49:12 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:49:12 PM	Tube furnace set to 0
6/2/2010	1:50:32 PM	Helium valve closed
6/2/2010	1:50:32 PM	H2 valve closed
6/2/2010	1:50:32 PM	BCl3 valve closed
6/2/2010	1:50:32 PM	PH3 valve closed
6/2/2010	1:50:32 PM	SiCl4 pre valve closed
6/2/2010	1:50:32 PM	SiCl4 post valve closed
6/2/2010	1:50:32 PM	Main Vac valve closed
6/2/2010	1:50:32 PM	Bypass valve closed
6/2/2010	1:50:32 PM	Bubbler valve closed
6/2/2010	1:50:32 PM	Helium MFC set to  0.000000
6/2/2010	1:50:32 PM	H2 MFC set to  0.000000
6/2/2010	1:50:32 PM	BCl3 MFC set to  0.000000
6/2/2010	1:50:32 PM	PHl3 MFC set to  0.000000
6/2/2010	1:50:32 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:50:32 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:50:32 PM	Tube furnace set to 0
6/2/2010	1:50:47 PM	Helium valve closed
6/2/2010	1:50:47 PM	H2 valve closed
6/2/2010	1:50:47 PM	BCl3 valve closed
6/2/2010	1:50:47 PM	PH3 valve closed
6/2/2010	1:50:47 PM	SiCl4 pre valve closed
6/2/2010	1:50:47 PM	SiCl4 post valve closed
6/2/2010	1:50:47 PM	Main Vac valve closed
6/2/2010	1:50:47 PM	Bubbler valve closed
6/2/2010	1:50:47 PM	Bypass valve opened
6/2/2010	1:50:47 PM	Helium MFC set to  0.000000
6/2/2010	1:50:47 PM	H2 MFC set to  0.000000
6/2/2010	1:50:47 PM	BCl3 MFC set to  0.000000
6/2/2010	1:50:47 PM	PHl3 MFC set to  0.000000
6/2/2010	1:50:47 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:50:47 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:50:47 PM	Tube furnace set to 0
6/2/2010	1:51:20 PM	Helium valve closed
6/2/2010	1:51:20 PM	H2 valve closed
6/2/2010	1:51:20 PM	BCl3 valve closed
6/2/2010	1:51:20 PM	PH3 valve closed
6/2/2010	1:51:20 PM	SiCl4 pre valve closed
6/2/2010	1:51:20 PM	SiCl4 post valve closed
6/2/2010	1:51:20 PM	Bubbler valve closed
6/2/2010	1:51:20 PM	Main Vac valve opened
6/2/2010	1:51:20 PM	Bypass valve opened
6/2/2010	1:51:20 PM	Helium MFC set to  0.000000
6/2/2010	1:51:20 PM	H2 MFC set to  0.000000
6/2/2010	1:51:20 PM	BCl3 MFC set to  0.000000
6/2/2010	1:51:20 PM	PHl3 MFC set to  0.000000
6/2/2010	1:51:20 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:51:20 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:51:20 PM	Tube furnace set to 0
6/2/2010	1:56:20 PM	Helium valve closed
6/2/2010	1:56:20 PM	H2 valve closed
6/2/2010	1:56:20 PM	BCl3 valve closed
6/2/2010	1:56:20 PM	PH3 valve closed
6/2/2010	1:56:20 PM	SiCl4 pre valve closed
6/2/2010	1:56:20 PM	SiCl4 post valve closed
6/2/2010	1:56:20 PM	Bubbler valve closed
6/2/2010	1:56:20 PM	Main Vac valve opened
6/2/2010	1:56:20 PM	Bypass valve opened
6/2/2010	1:56:20 PM	Helium MFC set to  0.000000
6/2/2010	1:56:20 PM	H2 MFC set to  0.000000
6/2/2010	1:56:20 PM	BCl3 MFC set to  0.000000
6/2/2010	1:56:20 PM	PHl3 MFC set to  0.000000
6/2/2010	1:56:20 PM	SiCl4 MFC set to  0.000000
6/2/2010	1:56:20 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	1:56:20 PM	Tube furnace set to 0
6/2/2010	1:56:21 PM	Run finished at 1:56 PM
6/2/2010	1:56:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/2/2010	2:06:56 PM	Helium MFC set to  500.000000
6/2/2010	2:06:57 PM	Helium valve opened
6/2/2010	2:26:00 PM	Helium MFC set to  0.000000
6/2/2010	2:26:01 PM	Helium valve closed
6/2/2010	2:45:13 PM	Helium MFC set to  500.000000
6/2/2010	2:45:14 PM	Helium valve opened
6/2/2010	2:50:39 PM	Helium MFC set to  0.000000
6/2/2010	2:50:40 PM	Helium valve closed
6/2/2010	2:51:16 PM	Bypass valve closed
6/2/2010	2:51:16 PM	Main Vac valve closed
6/2/2010	2:51:27 PM	Bypass valve opened
6/2/2010	2:51:27 PM	Main Vac valve opened
6/2/2010	2:52:01 PM	Recipe started at 2:52 PM
6/2/2010	2:52:01 PM	Helium valve closed
6/2/2010	2:52:01 PM	BCl3 valve closed
6/2/2010	2:52:01 PM	PH3 valve closed
6/2/2010	2:52:01 PM	SiCl4 pre valve closed
6/2/2010	2:52:01 PM	SiCl4 post valve closed
6/2/2010	2:52:01 PM	Main Vac valve closed
6/2/2010	2:52:01 PM	Bypass valve closed
6/2/2010	2:52:01 PM	Bubbler valve closed
6/2/2010	2:52:01 PM	H2 valve opened
6/2/2010	2:52:01 PM	Helium MFC set to  0.000000
6/2/2010	2:52:01 PM	H2 MFC set to  500.000000
6/2/2010	2:52:01 PM	BCl3 MFC set to  0.000000
6/2/2010	2:52:01 PM	PHl3 MFC set to  0.000000
6/2/2010	2:52:01 PM	SiCl4 MFC set to  0.000000
6/2/2010	2:52:01 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	2:52:02 PM	Tube furnace set to 0
6/2/2010	2:53:23 PM	Helium valve closed
6/2/2010	2:53:23 PM	BCl3 valve closed
6/2/2010	2:53:23 PM	PH3 valve closed
6/2/2010	2:53:23 PM	SiCl4 pre valve closed
6/2/2010	2:53:23 PM	SiCl4 post valve closed
6/2/2010	2:53:23 PM	Main Vac valve closed
6/2/2010	2:53:23 PM	Bypass valve closed
6/2/2010	2:53:23 PM	H2 valve opened
6/2/2010	2:53:23 PM	Bubbler valve opened
6/2/2010	2:53:23 PM	Helium MFC set to  0.000000
6/2/2010	2:53:23 PM	H2 MFC set to  500.000000
6/2/2010	2:53:23 PM	BCl3 MFC set to  0.000000
6/2/2010	2:53:23 PM	PHl3 MFC set to  0.000000
6/2/2010	2:53:23 PM	SiCl4 MFC set to  0.000000
6/2/2010	2:53:23 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	2:53:23 PM	Tube furnace set to 1000
6/2/2010	3:13:23 PM	Helium valve closed
6/2/2010	3:13:23 PM	PH3 valve closed
6/2/2010	3:13:23 PM	Main Vac valve closed
6/2/2010	3:13:23 PM	Bypass valve closed
6/2/2010	3:13:23 PM	H2 valve opened
6/2/2010	3:13:23 PM	BCl3 valve opened
6/2/2010	3:13:23 PM	SiCl4 pre valve opened
6/2/2010	3:13:23 PM	SiCl4 post valve opened
6/2/2010	3:13:23 PM	Bubbler valve opened
6/2/2010	3:13:23 PM	Helium MFC set to  0.000000
6/2/2010	3:13:23 PM	H2 MFC set to  500.000000
6/2/2010	3:13:23 PM	BCl3 MFC set to  35.000000
6/2/2010	3:13:23 PM	PHl3 MFC set to  0.000000
6/2/2010	3:13:23 PM	SiCl4 MFC set to  50.000000
6/2/2010	3:13:23 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	3:13:23 PM	Tube furnace set to 1000
6/2/2010	3:28:23 PM	H2 valve closed
6/2/2010	3:28:23 PM	BCl3 valve closed
6/2/2010	3:28:23 PM	PH3 valve closed
6/2/2010	3:28:23 PM	SiCl4 pre valve closed
6/2/2010	3:28:23 PM	SiCl4 post valve closed
6/2/2010	3:28:23 PM	Main Vac valve closed
6/2/2010	3:28:23 PM	Bypass valve closed
6/2/2010	3:28:23 PM	Helium valve opened
6/2/2010	3:28:23 PM	Bubbler valve opened
6/2/2010	3:28:23 PM	Helium MFC set to  500.000000
6/2/2010	3:28:23 PM	H2 MFC set to  0.000000
6/2/2010	3:28:23 PM	BCl3 MFC set to  0.000000
6/2/2010	3:28:23 PM	PHl3 MFC set to  0.000000
6/2/2010	3:28:23 PM	SiCl4 MFC set to  0.000000
6/2/2010	3:28:23 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	3:28:23 PM	Tube furnace set to 0
6/2/2010	3:48:23 PM	Helium valve closed
6/2/2010	3:48:23 PM	H2 valve closed
6/2/2010	3:48:23 PM	BCl3 valve closed
6/2/2010	3:48:23 PM	PH3 valve closed
6/2/2010	3:48:23 PM	SiCl4 pre valve closed
6/2/2010	3:48:23 PM	SiCl4 post valve closed
6/2/2010	3:48:23 PM	Main Vac valve closed
6/2/2010	3:48:23 PM	Bypass valve closed
6/2/2010	3:48:23 PM	Bubbler valve closed
6/2/2010	3:48:23 PM	Helium MFC set to  0.000000
6/2/2010	3:48:23 PM	H2 MFC set to  0.000000
6/2/2010	3:48:23 PM	BCl3 MFC set to  0.000000
6/2/2010	3:48:23 PM	PHl3 MFC set to  0.000000
6/2/2010	3:48:23 PM	SiCl4 MFC set to  0.000000
6/2/2010	3:48:23 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	3:48:23 PM	Tube furnace set to 0
6/2/2010	3:48:23 PM	Run finished at 3:48 PM
6/2/2010	4:07:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	4:07:46 PM	Recipe started at 4:07 PM
6/2/2010	4:07:46 PM	H2 valve closed
6/2/2010	4:07:46 PM	BCl3 valve closed
6/2/2010	4:07:46 PM	PH3 valve closed
6/2/2010	4:07:46 PM	SiCl4 pre valve closed
6/2/2010	4:07:46 PM	SiCl4 post valve closed
6/2/2010	4:07:46 PM	Main Vac valve closed
6/2/2010	4:07:46 PM	Bypass valve closed
6/2/2010	4:07:46 PM	Bubbler valve closed
6/2/2010	4:07:46 PM	Helium valve opened
6/2/2010	4:07:46 PM	Helium MFC set to  500.000000
6/2/2010	4:07:46 PM	H2 MFC set to  0.000000
6/2/2010	4:07:46 PM	BCl3 MFC set to  0.000000
6/2/2010	4:07:46 PM	PHl3 MFC set to  0.000000
6/2/2010	4:07:46 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:07:46 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:07:46 PM	Tube furnace set to 0
6/2/2010	4:07:47 PM	Helium valve closed
6/2/2010	4:07:47 PM	H2 valve closed
6/2/2010	4:07:47 PM	BCl3 valve closed
6/2/2010	4:07:47 PM	PH3 valve closed
6/2/2010	4:07:47 PM	SiCl4 pre valve closed
6/2/2010	4:07:47 PM	SiCl4 post valve closed
6/2/2010	4:07:47 PM	Main Vac valve closed
6/2/2010	4:07:47 PM	Bypass valve closed
6/2/2010	4:07:47 PM	Bubbler valve closed
6/2/2010	4:07:47 PM	Helium MFC set to  0.000000
6/2/2010	4:07:47 PM	H2 MFC set to  0.000000
6/2/2010	4:07:47 PM	BCl3 MFC set to  0.000000
6/2/2010	4:07:47 PM	PHl3 MFC set to  0.000000
6/2/2010	4:07:47 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:07:47 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:07:47 PM	Tube furnace set to 0
6/2/2010	4:07:47 PM	Run finished at 4:07 PM
6/2/2010	4:07:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/2/2010	4:16:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	4:16:17 PM	Recipe started at 4:16 PM
6/2/2010	4:16:17 PM	Helium valve closed
6/2/2010	4:16:17 PM	H2 valve closed
6/2/2010	4:16:17 PM	BCl3 valve closed
6/2/2010	4:16:17 PM	PH3 valve closed
6/2/2010	4:16:17 PM	SiCl4 pre valve closed
6/2/2010	4:16:17 PM	SiCl4 post valve closed
6/2/2010	4:16:17 PM	Main Vac valve closed
6/2/2010	4:16:17 PM	Bubbler valve closed
6/2/2010	4:16:17 PM	Bypass valve opened
6/2/2010	4:16:17 PM	Helium MFC set to  0.000000
6/2/2010	4:16:17 PM	H2 MFC set to  0.000000
6/2/2010	4:16:17 PM	BCl3 MFC set to  0.000000
6/2/2010	4:16:17 PM	PHl3 MFC set to  0.000000
6/2/2010	4:16:17 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:16:17 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:16:17 PM	Tube furnace set to 0
6/2/2010	4:17:06 PM	Helium valve closed
6/2/2010	4:17:06 PM	H2 valve closed
6/2/2010	4:17:06 PM	BCl3 valve closed
6/2/2010	4:17:06 PM	PH3 valve closed
6/2/2010	4:17:06 PM	SiCl4 pre valve closed
6/2/2010	4:17:06 PM	SiCl4 post valve closed
6/2/2010	4:17:06 PM	Bubbler valve closed
6/2/2010	4:17:06 PM	Main Vac valve opened
6/2/2010	4:17:06 PM	Bypass valve opened
6/2/2010	4:17:06 PM	Helium MFC set to  0.000000
6/2/2010	4:17:06 PM	H2 MFC set to  0.000000
6/2/2010	4:17:06 PM	BCl3 MFC set to  0.000000
6/2/2010	4:17:06 PM	PHl3 MFC set to  0.000000
6/2/2010	4:17:06 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:17:06 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:17:06 PM	Tube furnace set to 0
6/2/2010	4:17:07 PM	Run finished at 4:17 PM
6/2/2010	4:17:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	4:25:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/2/2010	4:26:00 PM	Recipe started at 4:25 PM
6/2/2010	4:26:00 PM	H2 valve closed
6/2/2010	4:26:00 PM	BCl3 valve closed
6/2/2010	4:26:00 PM	PH3 valve closed
6/2/2010	4:26:00 PM	SiCl4 pre valve closed
6/2/2010	4:26:00 PM	SiCl4 post valve closed
6/2/2010	4:26:00 PM	Main Vac valve closed
6/2/2010	4:26:00 PM	Bypass valve closed
6/2/2010	4:26:00 PM	Bubbler valve closed
6/2/2010	4:26:00 PM	Helium valve opened
6/2/2010	4:26:00 PM	Helium MFC set to  500.000000
6/2/2010	4:26:00 PM	H2 MFC set to  0.000000
6/2/2010	4:26:00 PM	BCl3 MFC set to  0.000000
6/2/2010	4:26:00 PM	PHl3 MFC set to  0.000000
6/2/2010	4:26:00 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:26:00 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:26:00 PM	Tube furnace set to 0
6/2/2010	4:27:20 PM	Helium valve closed
6/2/2010	4:27:20 PM	H2 valve closed
6/2/2010	4:27:20 PM	BCl3 valve closed
6/2/2010	4:27:20 PM	PH3 valve closed
6/2/2010	4:27:20 PM	SiCl4 pre valve closed
6/2/2010	4:27:20 PM	SiCl4 post valve closed
6/2/2010	4:27:20 PM	Main Vac valve closed
6/2/2010	4:27:20 PM	Bypass valve closed
6/2/2010	4:27:20 PM	Bubbler valve closed
6/2/2010	4:27:20 PM	Helium MFC set to  0.000000
6/2/2010	4:27:20 PM	H2 MFC set to  0.000000
6/2/2010	4:27:20 PM	BCl3 MFC set to  0.000000
6/2/2010	4:27:20 PM	PHl3 MFC set to  0.000000
6/2/2010	4:27:20 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:27:20 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:27:20 PM	Tube furnace set to 0
6/2/2010	4:27:35 PM	Helium valve closed
6/2/2010	4:27:35 PM	H2 valve closed
6/2/2010	4:27:35 PM	BCl3 valve closed
6/2/2010	4:27:35 PM	PH3 valve closed
6/2/2010	4:27:35 PM	SiCl4 pre valve closed
6/2/2010	4:27:35 PM	SiCl4 post valve closed
6/2/2010	4:27:35 PM	Main Vac valve closed
6/2/2010	4:27:35 PM	Bubbler valve closed
6/2/2010	4:27:35 PM	Bypass valve opened
6/2/2010	4:27:35 PM	Helium MFC set to  0.000000
6/2/2010	4:27:35 PM	H2 MFC set to  0.000000
6/2/2010	4:27:35 PM	BCl3 MFC set to  0.000000
6/2/2010	4:27:35 PM	PHl3 MFC set to  0.000000
6/2/2010	4:27:35 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:27:35 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:27:35 PM	Tube furnace set to 0
6/2/2010	4:28:08 PM	Helium valve closed
6/2/2010	4:28:08 PM	H2 valve closed
6/2/2010	4:28:08 PM	BCl3 valve closed
6/2/2010	4:28:08 PM	PH3 valve closed
6/2/2010	4:28:08 PM	SiCl4 pre valve closed
6/2/2010	4:28:08 PM	SiCl4 post valve closed
6/2/2010	4:28:08 PM	Bubbler valve closed
6/2/2010	4:28:08 PM	Main Vac valve opened
6/2/2010	4:28:08 PM	Bypass valve opened
6/2/2010	4:28:08 PM	Helium MFC set to  0.000000
6/2/2010	4:28:08 PM	H2 MFC set to  0.000000
6/2/2010	4:28:08 PM	BCl3 MFC set to  0.000000
6/2/2010	4:28:08 PM	PHl3 MFC set to  0.000000
6/2/2010	4:28:08 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:28:08 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:28:08 PM	Tube furnace set to 0
6/2/2010	4:33:08 PM	H2 valve closed
6/2/2010	4:33:08 PM	BCl3 valve closed
6/2/2010	4:33:08 PM	PH3 valve closed
6/2/2010	4:33:08 PM	SiCl4 pre valve closed
6/2/2010	4:33:08 PM	SiCl4 post valve closed
6/2/2010	4:33:08 PM	Main Vac valve closed
6/2/2010	4:33:08 PM	Bypass valve closed
6/2/2010	4:33:08 PM	Bubbler valve closed
6/2/2010	4:33:08 PM	Helium valve opened
6/2/2010	4:33:08 PM	Helium MFC set to  500.000000
6/2/2010	4:33:08 PM	H2 MFC set to  0.000000
6/2/2010	4:33:08 PM	BCl3 MFC set to  0.000000
6/2/2010	4:33:08 PM	PHl3 MFC set to  0.000000
6/2/2010	4:33:08 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:33:08 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:33:08 PM	Tube furnace set to 0
6/2/2010	4:34:28 PM	Helium valve closed
6/2/2010	4:34:28 PM	H2 valve closed
6/2/2010	4:34:28 PM	BCl3 valve closed
6/2/2010	4:34:28 PM	PH3 valve closed
6/2/2010	4:34:28 PM	SiCl4 pre valve closed
6/2/2010	4:34:28 PM	SiCl4 post valve closed
6/2/2010	4:34:28 PM	Main Vac valve closed
6/2/2010	4:34:28 PM	Bypass valve closed
6/2/2010	4:34:28 PM	Bubbler valve closed
6/2/2010	4:34:28 PM	Helium MFC set to  0.000000
6/2/2010	4:34:28 PM	H2 MFC set to  0.000000
6/2/2010	4:34:28 PM	BCl3 MFC set to  0.000000
6/2/2010	4:34:28 PM	PHl3 MFC set to  0.000000
6/2/2010	4:34:28 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:34:28 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:34:28 PM	Tube furnace set to 0
6/2/2010	4:34:43 PM	Helium valve closed
6/2/2010	4:34:43 PM	H2 valve closed
6/2/2010	4:34:43 PM	BCl3 valve closed
6/2/2010	4:34:43 PM	PH3 valve closed
6/2/2010	4:34:43 PM	SiCl4 pre valve closed
6/2/2010	4:34:43 PM	SiCl4 post valve closed
6/2/2010	4:34:43 PM	Main Vac valve closed
6/2/2010	4:34:43 PM	Bubbler valve closed
6/2/2010	4:34:43 PM	Bypass valve opened
6/2/2010	4:34:43 PM	Helium MFC set to  0.000000
6/2/2010	4:34:43 PM	H2 MFC set to  0.000000
6/2/2010	4:34:43 PM	BCl3 MFC set to  0.000000
6/2/2010	4:34:43 PM	PHl3 MFC set to  0.000000
6/2/2010	4:34:43 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:34:43 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:34:43 PM	Tube furnace set to 0
6/2/2010	4:35:16 PM	Helium valve closed
6/2/2010	4:35:16 PM	H2 valve closed
6/2/2010	4:35:16 PM	BCl3 valve closed
6/2/2010	4:35:16 PM	PH3 valve closed
6/2/2010	4:35:16 PM	SiCl4 pre valve closed
6/2/2010	4:35:16 PM	SiCl4 post valve closed
6/2/2010	4:35:16 PM	Bubbler valve closed
6/2/2010	4:35:16 PM	Main Vac valve opened
6/2/2010	4:35:16 PM	Bypass valve opened
6/2/2010	4:35:16 PM	Helium MFC set to  0.000000
6/2/2010	4:35:16 PM	H2 MFC set to  0.000000
6/2/2010	4:35:16 PM	BCl3 MFC set to  0.000000
6/2/2010	4:35:16 PM	PHl3 MFC set to  0.000000
6/2/2010	4:35:16 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:35:16 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:35:16 PM	Tube furnace set to 0
6/2/2010	4:40:16 PM	H2 valve closed
6/2/2010	4:40:16 PM	BCl3 valve closed
6/2/2010	4:40:16 PM	PH3 valve closed
6/2/2010	4:40:16 PM	SiCl4 pre valve closed
6/2/2010	4:40:16 PM	SiCl4 post valve closed
6/2/2010	4:40:16 PM	Main Vac valve closed
6/2/2010	4:40:16 PM	Bypass valve closed
6/2/2010	4:40:16 PM	Bubbler valve closed
6/2/2010	4:40:16 PM	Helium valve opened
6/2/2010	4:40:16 PM	Helium MFC set to  500.000000
6/2/2010	4:40:16 PM	H2 MFC set to  0.000000
6/2/2010	4:40:16 PM	BCl3 MFC set to  0.000000
6/2/2010	4:40:16 PM	PHl3 MFC set to  0.000000
6/2/2010	4:40:16 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:40:16 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:40:16 PM	Tube furnace set to 0
6/2/2010	4:41:35 PM	Helium valve closed
6/2/2010	4:41:35 PM	H2 valve closed
6/2/2010	4:41:35 PM	BCl3 valve closed
6/2/2010	4:41:35 PM	PH3 valve closed
6/2/2010	4:41:35 PM	SiCl4 pre valve closed
6/2/2010	4:41:35 PM	SiCl4 post valve closed
6/2/2010	4:41:35 PM	Main Vac valve closed
6/2/2010	4:41:35 PM	Bypass valve closed
6/2/2010	4:41:35 PM	Bubbler valve closed
6/2/2010	4:41:35 PM	Helium MFC set to  0.000000
6/2/2010	4:41:35 PM	H2 MFC set to  0.000000
6/2/2010	4:41:35 PM	BCl3 MFC set to  0.000000
6/2/2010	4:41:35 PM	PHl3 MFC set to  0.000000
6/2/2010	4:41:35 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:41:35 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:41:36 PM	Tube furnace set to 0
6/2/2010	4:41:51 PM	Helium valve closed
6/2/2010	4:41:51 PM	H2 valve closed
6/2/2010	4:41:51 PM	BCl3 valve closed
6/2/2010	4:41:51 PM	PH3 valve closed
6/2/2010	4:41:51 PM	SiCl4 pre valve closed
6/2/2010	4:41:51 PM	SiCl4 post valve closed
6/2/2010	4:41:51 PM	Main Vac valve closed
6/2/2010	4:41:51 PM	Bubbler valve closed
6/2/2010	4:41:51 PM	Bypass valve opened
6/2/2010	4:41:51 PM	Helium MFC set to  0.000000
6/2/2010	4:41:51 PM	H2 MFC set to  0.000000
6/2/2010	4:41:51 PM	BCl3 MFC set to  0.000000
6/2/2010	4:41:51 PM	PHl3 MFC set to  0.000000
6/2/2010	4:41:51 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:41:51 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:41:51 PM	Tube furnace set to 0
6/2/2010	4:42:23 PM	Helium valve closed
6/2/2010	4:42:23 PM	H2 valve closed
6/2/2010	4:42:23 PM	BCl3 valve closed
6/2/2010	4:42:23 PM	PH3 valve closed
6/2/2010	4:42:23 PM	SiCl4 pre valve closed
6/2/2010	4:42:23 PM	SiCl4 post valve closed
6/2/2010	4:42:23 PM	Bubbler valve closed
6/2/2010	4:42:23 PM	Main Vac valve opened
6/2/2010	4:42:23 PM	Bypass valve opened
6/2/2010	4:42:23 PM	Helium MFC set to  0.000000
6/2/2010	4:42:24 PM	H2 MFC set to  0.000000
6/2/2010	4:42:24 PM	BCl3 MFC set to  0.000000
6/2/2010	4:42:24 PM	PHl3 MFC set to  0.000000
6/2/2010	4:42:24 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:42:24 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:42:24 PM	Tube furnace set to 0
6/2/2010	4:47:24 PM	Helium valve closed
6/2/2010	4:47:24 PM	H2 valve closed
6/2/2010	4:47:24 PM	BCl3 valve closed
6/2/2010	4:47:24 PM	PH3 valve closed
6/2/2010	4:47:24 PM	SiCl4 pre valve closed
6/2/2010	4:47:24 PM	SiCl4 post valve closed
6/2/2010	4:47:24 PM	Bubbler valve closed
6/2/2010	4:47:24 PM	Main Vac valve opened
6/2/2010	4:47:24 PM	Bypass valve opened
6/2/2010	4:47:24 PM	Helium MFC set to  0.000000
6/2/2010	4:47:24 PM	H2 MFC set to  0.000000
6/2/2010	4:47:24 PM	BCl3 MFC set to  0.000000
6/2/2010	4:47:24 PM	PHl3 MFC set to  0.000000
6/2/2010	4:47:24 PM	SiCl4 MFC set to  0.000000
6/2/2010	4:47:24 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	4:47:24 PM	Tube furnace set to 0
6/2/2010	4:47:25 PM	Run finished at 4:47 PM
6/2/2010	4:47:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/2/2010	5:21:24 PM	Helium MFC set to  500.000000
6/2/2010	5:21:25 PM	Helium valve opened
6/2/2010	5:22:58 PM	Helium MFC set to  0.000000
6/2/2010	5:22:59 PM	Helium valve closed
6/2/2010	5:23:42 PM	Helium MFC set to  500.000000
6/2/2010	5:23:44 PM	Helium valve opened
6/2/2010	5:33:29 PM	Helium MFC set to  0.000000
6/2/2010	5:33:30 PM	Helium valve closed
6/2/2010	5:34:11 PM	Bypass valve closed
6/2/2010	5:34:11 PM	Main Vac valve closed
6/2/2010	5:34:23 PM	Bypass valve opened
6/2/2010	5:34:23 PM	Main Vac valve opened
6/2/2010	5:34:50 PM	Recipe started at 5:34 PM
6/2/2010	5:34:50 PM	Helium valve closed
6/2/2010	5:34:50 PM	BCl3 valve closed
6/2/2010	5:34:50 PM	PH3 valve closed
6/2/2010	5:34:50 PM	SiCl4 pre valve closed
6/2/2010	5:34:50 PM	SiCl4 post valve closed
6/2/2010	5:34:50 PM	Main Vac valve closed
6/2/2010	5:34:50 PM	Bypass valve closed
6/2/2010	5:34:50 PM	Bubbler valve closed
6/2/2010	5:34:50 PM	H2 valve opened
6/2/2010	5:34:50 PM	Helium MFC set to  0.000000
6/2/2010	5:34:50 PM	H2 MFC set to  500.000000
6/2/2010	5:34:50 PM	BCl3 MFC set to  0.000000
6/2/2010	5:34:50 PM	PHl3 MFC set to  0.000000
6/2/2010	5:34:50 PM	SiCl4 MFC set to  0.000000
6/2/2010	5:34:50 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	5:34:50 PM	Tube furnace set to 0
6/2/2010	5:36:10 PM	Helium valve closed
6/2/2010	5:36:10 PM	BCl3 valve closed
6/2/2010	5:36:10 PM	PH3 valve closed
6/2/2010	5:36:10 PM	SiCl4 pre valve closed
6/2/2010	5:36:10 PM	SiCl4 post valve closed
6/2/2010	5:36:10 PM	Main Vac valve closed
6/2/2010	5:36:10 PM	Bypass valve closed
6/2/2010	5:36:10 PM	H2 valve opened
6/2/2010	5:36:10 PM	Bubbler valve opened
6/2/2010	5:36:10 PM	Helium MFC set to  0.000000
6/2/2010	5:36:10 PM	H2 MFC set to  500.000000
6/2/2010	5:36:10 PM	BCl3 MFC set to  0.000000
6/2/2010	5:36:10 PM	PHl3 MFC set to  0.000000
6/2/2010	5:36:10 PM	SiCl4 MFC set to  0.000000
6/2/2010	5:36:10 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	5:36:10 PM	Tube furnace set to 1000
6/2/2010	5:56:10 PM	Helium valve closed
6/2/2010	5:56:10 PM	PH3 valve closed
6/2/2010	5:56:10 PM	Main Vac valve closed
6/2/2010	5:56:10 PM	Bypass valve closed
6/2/2010	5:56:10 PM	H2 valve opened
6/2/2010	5:56:10 PM	BCl3 valve opened
6/2/2010	5:56:10 PM	SiCl4 pre valve opened
6/2/2010	5:56:10 PM	SiCl4 post valve opened
6/2/2010	5:56:10 PM	Bubbler valve opened
6/2/2010	5:56:10 PM	Helium MFC set to  0.000000
6/2/2010	5:56:10 PM	H2 MFC set to  500.000000
6/2/2010	5:56:10 PM	BCl3 MFC set to  35.000000
6/2/2010	5:56:10 PM	PHl3 MFC set to  0.000000
6/2/2010	5:56:10 PM	SiCl4 MFC set to  50.000000
6/2/2010	5:56:10 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	5:56:11 PM	Tube furnace set to 1000
6/2/2010	6:11:10 PM	H2 valve closed
6/2/2010	6:11:10 PM	BCl3 valve closed
6/2/2010	6:11:11 PM	PH3 valve closed
6/2/2010	6:11:11 PM	SiCl4 pre valve closed
6/2/2010	6:11:11 PM	SiCl4 post valve closed
6/2/2010	6:11:11 PM	Main Vac valve closed
6/2/2010	6:11:11 PM	Bypass valve closed
6/2/2010	6:11:11 PM	Helium valve opened
6/2/2010	6:11:11 PM	Bubbler valve opened
6/2/2010	6:11:11 PM	Helium MFC set to  500.000000
6/2/2010	6:11:11 PM	H2 MFC set to  0.000000
6/2/2010	6:11:11 PM	BCl3 MFC set to  0.000000
6/2/2010	6:11:11 PM	PHl3 MFC set to  0.000000
6/2/2010	6:11:11 PM	SiCl4 MFC set to  0.000000
6/2/2010	6:11:11 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	6:11:11 PM	Tube furnace set to 0
6/2/2010	6:31:11 PM	Helium valve closed
6/2/2010	6:31:11 PM	H2 valve closed
6/2/2010	6:31:11 PM	BCl3 valve closed
6/2/2010	6:31:11 PM	PH3 valve closed
6/2/2010	6:31:11 PM	SiCl4 pre valve closed
6/2/2010	6:31:11 PM	SiCl4 post valve closed
6/2/2010	6:31:11 PM	Main Vac valve closed
6/2/2010	6:31:11 PM	Bypass valve closed
6/2/2010	6:31:11 PM	Bubbler valve closed
6/2/2010	6:31:11 PM	Helium MFC set to  0.000000
6/2/2010	6:31:11 PM	H2 MFC set to  0.000000
6/2/2010	6:31:11 PM	BCl3 MFC set to  0.000000
6/2/2010	6:31:11 PM	PHl3 MFC set to  0.000000
6/2/2010	6:31:11 PM	SiCl4 MFC set to  0.000000
6/2/2010	6:31:11 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	6:31:11 PM	Tube furnace set to 0
6/2/2010	6:31:11 PM	Run finished at 6:31 PM
6/2/2010	6:34:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/2/2010	6:34:11 PM	Recipe started at 6:34 PM
6/2/2010	6:34:11 PM	Helium valve closed
6/2/2010	6:34:11 PM	H2 valve closed
6/2/2010	6:34:11 PM	BCl3 valve closed
6/2/2010	6:34:11 PM	PH3 valve closed
6/2/2010	6:34:11 PM	SiCl4 pre valve closed
6/2/2010	6:34:11 PM	SiCl4 post valve closed
6/2/2010	6:34:11 PM	Main Vac valve closed
6/2/2010	6:34:11 PM	Bubbler valve closed
6/2/2010	6:34:11 PM	Bypass valve opened
6/2/2010	6:34:11 PM	Helium MFC set to  0.000000
6/2/2010	6:34:11 PM	H2 MFC set to  0.000000
6/2/2010	6:34:11 PM	BCl3 MFC set to  0.000000
6/2/2010	6:34:11 PM	PHl3 MFC set to  0.000000
6/2/2010	6:34:11 PM	SiCl4 MFC set to  0.000000
6/2/2010	6:34:11 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	6:34:12 PM	Tube furnace set to 0
6/2/2010	6:34:56 PM	Helium valve closed
6/2/2010	6:34:56 PM	H2 valve closed
6/2/2010	6:34:56 PM	BCl3 valve closed
6/2/2010	6:34:56 PM	PH3 valve closed
6/2/2010	6:34:56 PM	SiCl4 pre valve closed
6/2/2010	6:34:56 PM	SiCl4 post valve closed
6/2/2010	6:34:56 PM	Bubbler valve closed
6/2/2010	6:34:56 PM	Main Vac valve opened
6/2/2010	6:34:56 PM	Bypass valve opened
6/2/2010	6:34:56 PM	Helium MFC set to  0.000000
6/2/2010	6:34:56 PM	H2 MFC set to  0.000000
6/2/2010	6:34:56 PM	BCl3 MFC set to  0.000000
6/2/2010	6:34:56 PM	PHl3 MFC set to  0.000000
6/2/2010	6:34:56 PM	SiCl4 MFC set to  0.000000
6/2/2010	6:34:56 PM	Bypass solenoid MFC set to  0.000000
6/2/2010	6:34:56 PM	Tube furnace set to 0
6/2/2010	6:34:56 PM	Run finished at 6:34 PM
6/2/2010	6:34:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
